Difference between revisions of "Lithography Recipes"

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−
==Lift-Off Techniques==
 +
== Lift-Off Techniques ==
  +
−
*{{fl|Liftoff-Techniques.pdf|Description/Tutorial}}
 +
*{{fl|Liftoff-Techniques.pdf|Description/Tutorial}}
 
*{{fl|Bi-LayerContactprocesswithPMGI.pdf|Bi-Layer Process with PMGI Underlayer and Contact Aligner}}
  
*{{fl|Bi-LayerContactprocesswithPMGI.pdf|Bi-Layer Process with PMGI Underlayer and Contact Aligner}}
   
−
==Chemical Datasheets==
 +
== Chemical Datasheets ==
  +
 
{|
  
{|
−
|-valign="top"
 +
|- valign="top"
−
|width=400|
 +
| width="400" |
 
;Positive Photoresists
  
;Positive Photoresists
  +
−
*{{fl|AXP4000pb-Datasheet.pdf|AZP4000 (AZ4110, AZ4210, AZ4330)}}
  
−
*{{fl|OCG825-Positive-Resist-Datasheet.pdf|OCG825}}
 +
*{{fl|AXP4000pb-Datasheet.pdf|AZP4000 (AZ4110, AZ4210, AZ4330)}}
−
*{{fl|SPR220-Positive-Resist-Datasheet.pdf|SPR220 (SPR220-3, SPR220-7)}}
 +
*{{fl|OCG825-Positive-Resist-Datasheet.pdf|OCG825}}
−
*{{fl|SPR950-Positive-Resist-Datasheet.pdf|SPR950-0.8}}
 +
*{{fl|SPR220-Positive-Resist-Datasheet.pdf|SPR220 (SPR220-3, SPR220-7)}}
−
*{{fl|SPR955-Positive-Resist-Datasheet.pdf|SPR955CM (SPR955CM-0.9, SPR955CM-1.8)}}
 +
*{{fl|SPR950-Positive-Resist-Datasheet.pdf|SPR950-0.8}}
  +
*{{fl|SPR955-Positive-Resist-Datasheet.pdf|SPR955CM (SPR955CM-0.9, SPR955CM-1.8)}}
  ⚫
*{{fl|UV6-Positive-Resist-Datasheet.pdf|UV6-0.7}}
  +
 
;Negative Photoresists
  
;Negative Photoresists
  +
⚫
*{{fl|AZ5214-Negative-Resist-Datasheet.pdf|AZ5214}}
  
−
*{{fl|AZnLOF5510-Negative-Resist-Datasheet.pdf|AZnLOF5510}}
 +
*{{fl|AZ5214-Negative-Resist-Datasheet.pdf|AZ5214}}
  +
*{{fl|AZnLOF5510-Negative-Resist-Datasheet.pdf|AZnLOF5510}}
 
*{{fl|AZnLOF2020-Negative-Resist-Datasheet.pdf|AZnLOF2000 (AZnLOF2020, AZnLOF2035, AZnLOF2070)}}
  
*{{fl|AZnLOF2020-Negative-Resist-Datasheet.pdf|AZnLOF2000 (AZnLOF2020, AZnLOF2035, AZnLOF2070)}}
  +
 
;Underlayers
  
;Underlayers
  +
−
*{{fl|PMGI-Underlayer-Datasheet.pdf|PMGI (PMGI SF-11, PMGI SF-13, PMGI SF-15)}}
 +
*{{fl|PMGI-Underlayer-Datasheet.pdf|PMGI (PMGI SF-11, PMGI SF-13, PMGI SF-15)}}
 
*{{fl|LOL2000-Underlayer-Datasheet.pdf|Shipley LOL2000}}
  
*{{fl|LOL2000-Underlayer-Datasheet.pdf|Shipley LOL2000}}
  +
 
;E-beam resists
  
;E-beam resists
  +
−
*{{fl|PMMA-E-Beam-Resist-Datasheet.pdf|PMMA (PMMA, P(MMA-MAA) copolymer)}}
 +
*{{fl|PMMA-E-Beam-Resist-Datasheet.pdf|PMMA (PMMA, P(MMA-MAA) copolymer)}}
 
*{{fl|maN2403-E-Beam-Resist-Datasheet.pdf|maN 2403}}
  
*{{fl|maN2403-E-Beam-Resist-Datasheet.pdf|maN 2403}}
  +
−
|
 +
|
 
;Nanoimprinting
  
;Nanoimprinting
  +
−
*{{fl|NX1020-Nanoimprinting-Datasheet.pdf|NX1020}}
 +
*{{fl|NX1020-Nanoimprinting-Datasheet.pdf|NX1020}}
 
*{{fl|MRI-7020-Nanoimprinting-Datasheet.pdf|MRI-7020}}
  
*{{fl|MRI-7020-Nanoimprinting-Datasheet.pdf|MRI-7020}}
  +
 
;Contrast Enhancement Materials
  
;Contrast Enhancement Materials
  +
 
*{{fl|CEM365iS-Contrast-Enhancement-Datasheet.pdf|CEM365iS}}
  
*{{fl|CEM365iS-Contrast-Enhancement-Datasheet.pdf|CEM365iS}}
  +
 
;Anti-Reflection Coatings
  
;Anti-Reflection Coatings
  +
 
*{{fl|XHRiC-Anti-Reflective-Coating.pdf|XHRiC}}
  
*{{fl|XHRiC-Anti-Reflective-Coating.pdf|XHRiC}}
  +
 
;Developers
  
;Developers
  +
−
*{{fl|AZ400K-Developer-Datasheet.pdf|AZ400K (AZ400K, AZ400K1:4)}}
 +
*{{fl|AZ400K-Developer-Datasheet.pdf|AZ400K (AZ400K, AZ400K1:4)}}
 
*{{fl|AZ300MIF-Developer-Datasheet.pdf|AZ300MIF}}
  
*{{fl|AZ300MIF-Developer-Datasheet.pdf|AZ300MIF}}
  +
 
;Photoresist Removers
  
;Photoresist Removers
  +
⚫
*{{fl|1165-Resist-Remover.pdf|1165}}
  
−
*{{fl|AZ300T-Resist-Remover.pdf|AZ300T}}
 +
*{{fl|1165-Resist-Remover.pdf|1165}}
  ⚫
*{{fl|AZ300T-Resist-Remover.pdf|AZ300T}}
 
*{{fl|PRX-127-Resist-Remover.pdf|PRX-127}}
  
*{{fl|PRX-127-Resist-Remover.pdf|PRX-127}}
  +
 
|}
  
|}
   
−
==Recipes==
 +
== Recipes ==
  +
−
{{Recipe Table Explanation}}
 +
{{Recipe Table Explanation}}
  +
 
{| border="1" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center;" class="wikitable"
  
{| border="1" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center;" class="wikitable"
 
|- bgcolor="#D0E7FF"
  
|- bgcolor="#D0E7FF"
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! width="150" bgcolor="#D0E7FF" align="center" | '''Positive Resists'''
 
! width="150" bgcolor="#D0E7FF" align="center" | '''Positive Resists'''
 
{{LithRecipe Table}}
 
{{LithRecipe Table}}
  +
 
|-
  
|-
−
| bgcolor="#D0E7FF" align="center" | AZ4110
 +
| bgcolor="#D0E7FF" align="center" | AZ4110
−
| bgcolor="EEFFFF" | {{rl|Contact_Alignment_Recipes|Positive Resist (MJB-3)}}
 +
| bgcolor="EEFFFF" | {{rl|Contact_Alignment_Recipes|Positive Resist (MJB-3)}}
−
| bgcolor="EEFFFF" | {{rl|Contact_Alignment_Recipes|Positive Resist (MA-6)}}
 +
| bgcolor="EEFFFF" | {{rl|Contact_Alignment_Recipes|Positive Resist (MA-6)}}
 
| bgcolor="EEFFFF" |
 
| bgcolor="EEFFFF" |
 
| bgcolor="EEFFFF" |
 
| bgcolor="EEFFFF" |
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| bgcolor="EEFFFF" |
 
| bgcolor="EEFFFF" |
 
|-
  
|-
−
| bgcolor="#D0E7FF" align="center" | AZ4210
 +
| bgcolor="#D0E7FF" align="center" | AZ4210
−
| {{rl|Contact_Alignment_Recipes|Positive Resist (MJB-3)}}
 +
| {{rl|Contact_Alignment_Recipes|Positive Resist (MJB-3)}}
−
| {{rl|Contact_Alignment_Recipes|Positive Resist (MA-6)}}
 +
| {{rl|Contact_Alignment_Recipes|Positive Resist (MA-6)}}
 
| <br>
 
| <br>
 
| <br>
 
| <br>
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| <br>
  
| <br>
 
|-
  
|-
−
| bgcolor="#D0E7FF" align="center" | AZ4330RS
 +
| bgcolor="#D0E7FF" align="center" | AZ4330RS
−
| bgcolor="EEFFFF" | {{rl|Contact_Alignment_Recipes|Positive Resist (MJB-3)}}
 +
| bgcolor="EEFFFF" | {{rl|Contact_Alignment_Recipes|Positive Resist (MJB-3)}}
−
| bgcolor="EEFFFF" | {{rl|Contact_Alignment_Recipes|Positive Resist (MA-6)}}
 +
| bgcolor="EEFFFF" | {{rl|Contact_Alignment_Recipes|Positive Resist (MA-6)}}
 
| bgcolor="EEFFFF" |
 
| bgcolor="EEFFFF" |
 
| bgcolor="EEFFFF" |
 
| bgcolor="EEFFFF" |
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| bgcolor="EEFFFF" |
 
| bgcolor="EEFFFF" |
 
|-
  
|-
−
| bgcolor="#D0E7FF" align="center" | OCG 825-35CS
 +
| bgcolor="#D0E7FF" align="center" | OCG 825-35CS
 
| <br>
 
| <br>
 
| <br>
 
| <br>
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| <br>
  
| <br>
 
|-
  
|-
−
| bgcolor="#D0E7FF" align="center" | SPR 950-0.8
 +
| bgcolor="#D0E7FF" align="center" | SPR 950-0.8
 
| bgcolor="EEFFFF" |
 
| bgcolor="EEFFFF" |
 
| bgcolor="EEFFFF" |
 
| bgcolor="EEFFFF" |
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| bgcolor="EEFFFF" |
 
| bgcolor="EEFFFF" |
 
|-
  
|-
−
| bgcolor="#D0E7FF" align="center" | SPR 955 CM-0.9
 +
| bgcolor="#D0E7FF" align="center" | SPR 955 CM-0.9
 
| <br>
 
| <br>
 
| <br>
 
| <br>
 
| {{rl|Stepper Recipes|Positive Resist (GCA 6300)}}
 
| {{rl|Stepper Recipes|Positive Resist (GCA 6300)}}
−
| {{rl|Stepper Recipes|Positive Resist (AutoStep 200)}}
 +
| {{rl|Stepper Recipes|Positive Resist (AutoStep 200)}}
 
| <br>
 
| <br>
 
| <br>
 
| <br>
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| <br>
  
| <br>
 
|-
  
|-
−
| bgcolor="#D0E7FF" align="center" | SPR 955 CM-1.8
 +
| bgcolor="#D0E7FF" align="center" | SPR 955 CM-1.8
 
| bgcolor="EEFFFF" |
 
| bgcolor="EEFFFF" |
 
| bgcolor="EEFFFF" |
 
| bgcolor="EEFFFF" |
−
| bgcolor="EEFFFF" | {{rl|Stepper Recipes|Positive Resist (GCA 6300)}}
 +
| bgcolor="EEFFFF" | {{rl|Stepper Recipes|Positive Resist (GCA 6300)}}
−
| bgcolor="EEFFFF" | {{rl|Stepper Recipes|Positive Resist (AutoStep 200)}}
 +
| bgcolor="EEFFFF" | {{rl|Stepper Recipes|Positive Resist (AutoStep 200)}}
 
| bgcolor="EEFFFF" |
 
| bgcolor="EEFFFF" |
 
| bgcolor="EEFFFF" |
 
| bgcolor="EEFFFF" |
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| bgcolor="EEFFFF" |
 
| bgcolor="EEFFFF" |
 
|-
  
|-
−
| bgcolor="#D0E7FF" align="center" | SPR 220-3.0
 +
| bgcolor="#D0E7FF" align="center" | SPR 220-3.0
−
| {{rl|Contact_Alignment_Recipes|Positive Resist (MJB-3)}}
 +
| {{rl|Contact_Alignment_Recipes|Positive Resist (MJB-3)}}
−
| {{rl|Contact_Alignment_Recipes|Positive Resist (MA-6)}}
 +
| {{rl|Contact_Alignment_Recipes|Positive Resist (MA-6)}}
−
| {{rl|Stepper Recipes|Positive Resist (GCA 6300)}}
 +
| {{rl|Stepper Recipes|Positive Resist (GCA 6300)}}
−
| {{rl|Stepper Recipes|Positive Resist (AutoStep 200)}}
 +
| {{rl|Stepper Recipes|Positive Resist (AutoStep 200)}}
 
| <br>
 
| <br>
 
| <br>
 
| <br>
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| <br>
  
| <br>
 
|-
  
|-
−
| bgcolor="#D0E7FF" align="center" | SPR 220-7.0
 +
| bgcolor="#D0E7FF" align="center" | SPR 220-7.0
−
| bgcolor="EEFFFF" | {{rl|Contact_Alignment_Recipes|Positive Resist (MJB-3)}}
 +
| bgcolor="EEFFFF" | {{rl|Contact_Alignment_Recipes|Positive Resist (MJB-3)}}
−
| bgcolor="EEFFFF" | {{rl|Contact_Alignment_Recipes|Positive Resist (MA-6)}}
 +
| bgcolor="EEFFFF" | {{rl|Contact_Alignment_Recipes|Positive Resist (MA-6)}}
−
| bgcolor="EEFFFF" | {{rl|Stepper Recipes|Positive Resist (GCA 6300)}}
 +
| bgcolor="EEFFFF" | {{rl|Stepper Recipes|Positive Resist (GCA 6300)}}
−
| bgcolor="EEFFFF" | {{rl|Stepper Recipes|Positive Resist (AutoStep 200)}}
 +
| bgcolor="EEFFFF" | {{rl|Stepper Recipes|Positive Resist (AutoStep 200)}}
 
| bgcolor="EEFFFF" |
 
| bgcolor="EEFFFF" |
 
| bgcolor="EEFFFF" |
 
| bgcolor="EEFFFF" |
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| bgcolor="EEFFFF" |
 
| bgcolor="EEFFFF" |
 
|-
  
|-
−
| bgcolor="#D0E7FF" align="center" | THMR-IP3600 HP D
 +
| bgcolor="#D0E7FF" align="center" | THMR-IP3600 HP D
 
| <br>
 
| <br>
 
| <br>
 
| <br>
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| <br>
  
| <br>
 
|-
  
|-
−
| bgcolor="#D0E7FF" align="center" |UV6-0.7
+
| bgcolor="#D0E7FF" align="center" | UV6-0.7
 
| bgcolor="EEFFFF" |
 
| bgcolor="EEFFFF" |
 
| bgcolor="EEFFFF" |
 
| bgcolor="EEFFFF" |
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! bgcolor="#D0E7FF" align="center" | '''Negative Resists'''
 
! bgcolor="#D0E7FF" align="center" | '''Negative Resists'''
 
{{LithRecipe Table}}
 
{{LithRecipe Table}}
  +
−
|-bgcolor="EEFFFF"
  
−
| bgcolor="#D0E7FF" align="center" | AZ5214-EIR
 +
|- bgcolor="EEFFFF"
  +
| bgcolor="#D0E7FF" align="center" | AZ5214-EIR
⚫
| {{rl|Contact_Alignment_Recipes|Negative Resist (MJB-3)}}
  
−
| {{rl|Contact_Alignment_Recipes|Negative Resist (MA-6)}}
 +
| {{rl|Contact_Alignment_Recipes|Negative Resist (MJB-3)}}
−
| {{rl|Stepper Recipes|Negative Resist (GCA 6300)}}
 +
| {{rl|Contact_Alignment_Recipes|Negative Resist (MA-6)}}
−
| {{rl|Stepper Recipes|Negative Resist (AutoStep 200)}}
 +
| {{rl|Stepper Recipes|Negative Resist (GCA 6300)}}
  ⚫
| {{rl|Stepper Recipes|Negative Resist (AutoStep 200)}}
 
|
 
|
 
|
 
|
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|
 
|
 
|-
  
|-
−
| bgcolor="#D0E7FF" align="center" | AZnLOF 2020
 +
| bgcolor="#D0E7FF" align="center" | AZnLOF 2020
−
| {{rl|Contact_Alignment_Recipes|Positive Resist (MJB-3)}}
 +
| {{rl|Contact_Alignment_Recipes|Positive Resist (MJB-3)}}
−
| {{rl|Contact_Alignment_Recipes|Negative Resist (MA-6)}}
 +
| {{rl|Contact_Alignment_Recipes|Negative Resist (MA-6)}}
−
| {{rl|Stepper Recipes|Negative Resist (GCA 6300)}}
 +
| {{rl|Stepper Recipes|Negative Resist (GCA 6300)}}
−
| {{rl|Stepper Recipes|Negative Resist (AutoStep 200)}}
 +
| {{rl|Stepper Recipes|Negative Resist (AutoStep 200)}}
 
|
 
|
 
|
 
|
 
|
 
|
 
|
 
|
−
|-bgcolor="EEFFFF"
 +
|- bgcolor="EEFFFF"
−
| bgcolor="#D0E7FF" align="center" | AZnLOF 2035
 +
| bgcolor="#D0E7FF" align="center" | AZnLOF 2035
 
|
 
|
 
|
 
|
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|
 
|
 
|-
  
|-
−
| bgcolor="#D0E7FF" align="center" | AZnLOF 2070
 +
| bgcolor="#D0E7FF" align="center" | AZnLOF 2070
 
|
 
|
 
|
 
|
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|
 
|
 
|
 
|
−
|-bgcolor="EEFFFF"
 +
|- bgcolor="EEFFFF"
−
| bgcolor="#D0E7FF" align="center" | AZnLOF P5510
 +
| bgcolor="#D0E7FF" align="center" | AZnLOF P5510
 
|
 
|
 
|
 
|
−
| {{rl|Stepper Recipes|Negative Resist (GCA 6300)}}
 +
| {{rl|Stepper Recipes|Negative Resist (GCA 6300)}}
−
| {{rl|Stepper Recipes|Negative Resist (AutoStep 200)}}
 +
| {{rl|Stepper Recipes|Negative Resist (AutoStep 200)}}
 
|
 
|
 
|
 
|
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|
 
|
 
|-
  
|-
−
| bgcolor="#D0E7FF" align="center" | UVN30-0.5
 +
| bgcolor="#D0E7FF" align="center" | UVN30-0.5
 
|
 
|
 
|
 
|
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|
 
|
 
|
 
|
−
|-bgcolor="EEFFFF"
 +
|- bgcolor="EEFFFF"
−
| bgcolor="#D0E7FF" align="center" | SU-8 2015
 +
| bgcolor="#D0E7FF" align="center" | SU-8 2015
 
|
 
|
 
|
 
|
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! bgcolor="#D0E7FF" align="center" | '''Underlayers'''
 
! bgcolor="#D0E7FF" align="center" | '''Underlayers'''
 
{{LithRecipe Table}}
 
{{LithRecipe Table}}
  +
−
|-bgcolor="EEFFFF"
  
−
| bgcolor="#D0E7FF" align="center" | PMGI SF-11
 +
|- bgcolor="EEFFFF"
  +
| bgcolor="#D0E7FF" align="center" | PMGI SF-11
 
| <br>
 
| <br>
 
| <br>
 
| <br>
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| <br>
  
| <br>
 
|-
  
|-
−
| bgcolor="#D0E7FF" align="center" | PMGI SF-15
 +
| bgcolor="#D0E7FF" align="center" | PMGI SF-15
 
|
 
|
 
|
 
|
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|
 
|
 
|
 
|
⚫
|
 
 
|
 
|
 
|
 
|
  ⚫
|
−
|-bgcolor="EEFFFF"
  
−
| bgcolor="#D0E7FF" align="center" | LOL 2000
 +
|- bgcolor="EEFFFF"
  +
| bgcolor="#D0E7FF" align="center" | LOL 2000
 
|
 
|
 
|
 
|
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|
 
|
 
|-
  
|-
−
| bgcolor="#D0E7FF" align="center" | XHRIC-11 (BARC)
 +
| bgcolor="#D0E7FF" align="center" | XHRIC-11 (BARC)
 
|
 
|
 
|
 
|
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|
 
|
 
|
 
|
−
|-bgcolor="EEFFFF"
 +
|- bgcolor="EEFFFF"
−
| bgcolor="#D0E7FF" align="center" | AR-2 (BARC)
 +
| bgcolor="#D0E7FF" align="center" | AR-2 (BARC)
 
|
 
|
 
|
 
|
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|
 
|
 
|-
  
|-
−
| bgcolor="#D0E7FF" align="center" | DS-K 101-307 (BARC)
 +
| bgcolor="#D0E7FF" align="center" | DS-K 101-307 (BARC)
 
|
 
|
 
|
 
|
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! bgcolor="#D0E7FF" align="center" | '''Overlayers'''
 
! bgcolor="#D0E7FF" align="center" | '''Overlayers'''
 
{{LithRecipe Table}}
 
{{LithRecipe Table}}
  +
−
|-bgcolor="EEFFFF"
  
−
| bgcolor="#D0E7FF" align="center" | CEM-365 IS
 +
|- bgcolor="EEFFFF"
  +
| bgcolor="#D0E7FF" align="center" | CEM-365 IS
 
|
 
|
 
|
 
|
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! bgcolor="#D0E7FF" align="center" | '''E-Beam Resists'''
 
! bgcolor="#D0E7FF" align="center" | '''E-Beam Resists'''
 
{{LithRecipe Table}}
 
{{LithRecipe Table}}
  +
 
|- bgcolor="EEFFFF"
  
|- bgcolor="EEFFFF"
−
| bgcolor="#D0E7FF" align="center" | ??????
 +
| bgcolor="#D0E7FF" align="center" | &nbsp;??????
  ⚫
|
 
|
 
|
 
|
 
|
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|
 
|
 
|
 
|
⚫
|
 
 
|-
  
|-
−
| bgcolor="#D0E7FF" align="center" | ???????
 +
| bgcolor="#D0E7FF" align="center" | &nbsp;???????
 
|
 
|
 
|
 
|
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! bgcolor="#D0E7FF" align="center" | '''Nanoimprint Resists'''
 
! bgcolor="#D0E7FF" align="center" | '''Nanoimprint Resists'''
 
{{LithRecipe Table}}
 
{{LithRecipe Table}}
  +
 
|- bgcolor="EEFFFF"
  
|- bgcolor="EEFFFF"
−
| bgcolor="#D0E7FF" align="center" | MR-I 7020
 +
| bgcolor="#D0E7FF" align="center" | MR-I 7020
  ⚫
|
 
|
 
|
 
|
 
|
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|
 
|
 
|
 
|
⚫
|
 
 
|-
  
|-
−
| bgcolor="#D0E7FF" align="center" | Nanonex NX-1020
 +
| bgcolor="#D0E7FF" align="center" | Nanonex NX-1020
 
|
 
|
 
|
 
|
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|-
  
|-
 
! bgcolor="#D0E7FF" align="center" |
 
! bgcolor="#D0E7FF" align="center" |
−
{{LithRecipe Table}}
 +
{{LithRecipe Table}}
  +
 
|}
  
|}

Revision as of 13:58, 22 April 2013

Lift-Off Techniques

Chemical Datasheets

Positive Photoresists
Negative Photoresists
Underlayers
E-beam resists
Nanoimprinting
Contrast Enhancement Materials
Anti-Reflection Coatings
Developers
Photoresist Removers

Recipes

  • R = Recipe is available. Clicking this link will take you to the recipe.
  • A = Material is available for use, but no recipes are provided.


Lithography Recipes

 Contact Aligners Steppers Flood Expose E-Beam Lithography
Positive Resists SUSS MJB-3 SUSS MA-6 Stepper 1
(GCA 6300) 		Stepper 2
(AutoStep 200) 		Stepper 3
(ASML DUV) 		MLA150
(Heidelberg)


AZ4110 R R
AZ4210 R R





AZ4330RS R R
OCG 825-35CS







SPR 950-0.8
SPR 955 CM-0.9

R R



SPR 955 CM-1.8 R R
SPR 220-3.0 R R R R



SPR 220-7.0 R R R R
THMR-IP3600 HP D







UV6-0.7
Negative Resists SUSS MJB-3 SUSS MA-6 Stepper 1
(GCA 6300) 		Stepper 2
(AutoStep 200) 		Stepper 3
(ASML DUV) 		MLA150
(Heidelberg)


AZ5214-EIR R R R R
AZnLOF 2020 R R R R
AZnLOF 2035
AZnLOF 2070
AZnLOF P5510 R R
UVN30-0.5
SU-8 2015
Underlayers SUSS MJB-3 SUSS MA-6 Stepper 1
(GCA 6300) 		Stepper 2
(AutoStep 200) 		Stepper 3
(ASML DUV) 		MLA150
(Heidelberg)


PMGI SF-11







PMGI SF-15
LOL 2000
XHRIC-11 (BARC)
AR-2 (BARC)
DS-K 101-307 (BARC)
Overlayers SUSS MJB-3 SUSS MA-6 Stepper 1
(GCA 6300) 		Stepper 2
(AutoStep 200) 		Stepper 3
(ASML DUV) 		MLA150
(Heidelberg)


CEM-365 IS
E-Beam Resists SUSS MJB-3 SUSS MA-6 Stepper 1
(GCA 6300) 		Stepper 2
(AutoStep 200) 		Stepper 3
(ASML DUV) 		MLA150
(Heidelberg)


 ??????
 ???????
Nanoimprint Resists SUSS MJB-3 SUSS MA-6 Stepper 1
(GCA 6300) 		Stepper 2
(AutoStep 200) 		Stepper 3
(ASML DUV) 		MLA150
(Heidelberg)


MR-I 7020
Nanonex NX-1020
SUSS MJB-3 SUSS MA-6 Stepper 1
(GCA 6300) 		Stepper 2
(AutoStep 200) 		Stepper 3
(ASML DUV) 		MLA150
(Heidelberg)


Retrieved from "https://wiki.nanofab.ucsb.edu/w/index.php?title=Lithography_Recipes&oldid=2727"