Difference between revisions of "Lithography Recipes"
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*{{fl|AZ5214-Negative-Resist-Datasheet.pdf|AZ5214}} |
*{{fl|AZ5214-Negative-Resist-Datasheet.pdf|AZ5214}} |
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*{{fl|AZnLOF5510-Negative-Resist-Datasheet.pdf|AZnLOF5510}} |
*{{fl|AZnLOF5510-Negative-Resist-Datasheet.pdf|AZnLOF5510}} |
||
− | *{{fl|AZnLOF2020-Negative-Resist-Datasheet.pdf|AZnLOF2000 (AZnLOF2020, AZnLOF2035, AZnLOF2070)}} |
+ | *{{fl|AZnLOF2020-Negative-Resist-Datasheet.pdf|AZnLOF2000 (AZnLOF2020, AZnLOF2035, AZnLOF2070)}} |
+ | *{{fl|UVN2300-Negative-Resist-Datasheet.pdf|UVN2300-0.5}} |
||
;Underlayers |
;Underlayers |
Revision as of 14:17, 22 April 2013
Lift-Off Techniques
Chemical Datasheets
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Recipes
- R = Recipe is available. Clicking this link will take you to the recipe.
- A = Material is available for use, but no recipes are provided.