Difference between revisions of "Lithography Recipes"

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==Lift-Off Techniques==
+
== Lift-Off Techniques ==
*{{fl|Liftoff-Techniques.pdf|Description/Tutorial}}
+
 
 +
*{{fl|Liftoff-Techniques.pdf|Description/Tutorial}}  
 
*{{fl|Bi-LayerContactprocesswithPMGI.pdf|Bi-Layer Process with PMGI Underlayer and Contact Aligner}}
 
*{{fl|Bi-LayerContactprocesswithPMGI.pdf|Bi-Layer Process with PMGI Underlayer and Contact Aligner}}
  
==Chemical Datasheets==
+
== Chemical Datasheets ==
 +
 
 
{|
 
{|
|-valign="top"
+
|- valign="top"
|width=400|
+
| width="400" |  
 
;Positive Photoresists
 
;Positive Photoresists
*{{fl|AXP4000pb-Datasheet.pdf|AZP4000 (AZ4110, AZ4210, AZ4330)}}
+
 
*{{fl|OCG825-Positive-Resist-Datasheet.pdf|OCG825}}
+
*{{fl|AXP4000pb-Datasheet.pdf|AZP4000 (AZ4110, AZ4210, AZ4330)}}  
*{{fl|SPR220-Positive-Resist-Datasheet.pdf|SPR220 (SPR220-3, SPR220-7)}}
+
*{{fl|OCG825-Positive-Resist-Datasheet.pdf|OCG825}}  
*{{fl|SPR950-Positive-Resist-Datasheet.pdf|SPR950-0.8}}
+
*{{fl|SPR220-Positive-Resist-Datasheet.pdf|SPR220 (SPR220-3, SPR220-7)}}  
*{{fl|SPR955-Positive-Resist-Datasheet.pdf|SPR955CM (SPR955CM-0.9, SPR955CM-1.8)}}
+
*{{fl|SPR950-Positive-Resist-Datasheet.pdf|SPR950-0.8}}  
 +
*{{fl|SPR955-Positive-Resist-Datasheet.pdf|SPR955CM (SPR955CM-0.9, SPR955CM-1.8)}}  
 +
*{{fl|UV6-Positive-Resist-Datasheet.pdf|UV6-0.7}}
 +
 
 
;Negative Photoresists
 
;Negative Photoresists
*{{fl|AZ5214-Negative-Resist-Datasheet.pdf|AZ5214}}
+
 
*{{fl|AZnLOF5510-Negative-Resist-Datasheet.pdf|AZnLOF5510}}
+
*{{fl|AZ5214-Negative-Resist-Datasheet.pdf|AZ5214}}  
 +
*{{fl|AZnLOF5510-Negative-Resist-Datasheet.pdf|AZnLOF5510}}  
 
*{{fl|AZnLOF2020-Negative-Resist-Datasheet.pdf|AZnLOF2000 (AZnLOF2020, AZnLOF2035, AZnLOF2070)}}
 
*{{fl|AZnLOF2020-Negative-Resist-Datasheet.pdf|AZnLOF2000 (AZnLOF2020, AZnLOF2035, AZnLOF2070)}}
 +
 
;Underlayers
 
;Underlayers
*{{fl|PMGI-Underlayer-Datasheet.pdf|PMGI (PMGI SF-11, PMGI SF-13, PMGI SF-15)}}
+
 
 +
*{{fl|PMGI-Underlayer-Datasheet.pdf|PMGI (PMGI SF-11, PMGI SF-13, PMGI SF-15)}}  
 
*{{fl|LOL2000-Underlayer-Datasheet.pdf|Shipley LOL2000}}
 
*{{fl|LOL2000-Underlayer-Datasheet.pdf|Shipley LOL2000}}
 +
 
;E-beam resists
 
;E-beam resists
*{{fl|PMMA-E-Beam-Resist-Datasheet.pdf|PMMA (PMMA, P(MMA-MAA) copolymer)}}
+
 
 +
*{{fl|PMMA-E-Beam-Resist-Datasheet.pdf|PMMA (PMMA, P(MMA-MAA) copolymer)}}  
 
*{{fl|maN2403-E-Beam-Resist-Datasheet.pdf|maN 2403}}
 
*{{fl|maN2403-E-Beam-Resist-Datasheet.pdf|maN 2403}}
|
+
 
 +
|  
 
;Nanoimprinting
 
;Nanoimprinting
*{{fl|NX1020-Nanoimprinting-Datasheet.pdf|NX1020}}
+
 
 +
*{{fl|NX1020-Nanoimprinting-Datasheet.pdf|NX1020}}  
 
*{{fl|MRI-7020-Nanoimprinting-Datasheet.pdf|MRI-7020}}
 
*{{fl|MRI-7020-Nanoimprinting-Datasheet.pdf|MRI-7020}}
 +
 
;Contrast Enhancement Materials
 
;Contrast Enhancement Materials
 +
 
*{{fl|CEM365iS-Contrast-Enhancement-Datasheet.pdf|CEM365iS}}
 
*{{fl|CEM365iS-Contrast-Enhancement-Datasheet.pdf|CEM365iS}}
 +
 
;Anti-Reflection Coatings
 
;Anti-Reflection Coatings
 +
 
*{{fl|XHRiC-Anti-Reflective-Coating.pdf|XHRiC}}
 
*{{fl|XHRiC-Anti-Reflective-Coating.pdf|XHRiC}}
 +
 
;Developers
 
;Developers
*{{fl|AZ400K-Developer-Datasheet.pdf|AZ400K (AZ400K, AZ400K1:4)}}
+
 
 +
*{{fl|AZ400K-Developer-Datasheet.pdf|AZ400K (AZ400K, AZ400K1:4)}}  
 
*{{fl|AZ300MIF-Developer-Datasheet.pdf|AZ300MIF}}
 
*{{fl|AZ300MIF-Developer-Datasheet.pdf|AZ300MIF}}
 +
 
;Photoresist Removers
 
;Photoresist Removers
*{{fl|1165-Resist-Remover.pdf|1165}}
+
 
*{{fl|AZ300T-Resist-Remover.pdf|AZ300T}}
+
*{{fl|1165-Resist-Remover.pdf|1165}}  
 +
*{{fl|AZ300T-Resist-Remover.pdf|AZ300T}}  
 
*{{fl|PRX-127-Resist-Remover.pdf|PRX-127}}
 
*{{fl|PRX-127-Resist-Remover.pdf|PRX-127}}
 +
 
|}
 
|}
  
==Recipes==
+
== Recipes ==
{{Recipe Table Explanation}}
+
 
 +
{{Recipe Table Explanation}}  
 +
 
 
{| border="1" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center;" class="wikitable"
 
{| border="1" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center;" class="wikitable"
 
|- bgcolor="#D0E7FF"
 
|- bgcolor="#D0E7FF"
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! width="150" bgcolor="#D0E7FF" align="center" | '''Positive Resists'''  
 
! width="150" bgcolor="#D0E7FF" align="center" | '''Positive Resists'''  
 
{{LithRecipe Table}}  
 
{{LithRecipe Table}}  
 +
 
|-
 
|-
| bgcolor="#D0E7FF" align="center" | AZ4110
+
| bgcolor="#D0E7FF" align="center" | AZ4110  
| bgcolor="EEFFFF" | {{rl|Contact_Alignment_Recipes|Positive Resist (MJB-3)}}
+
| bgcolor="EEFFFF" | {{rl|Contact_Alignment_Recipes|Positive Resist (MJB-3)}}  
| bgcolor="EEFFFF" | {{rl|Contact_Alignment_Recipes|Positive Resist (MA-6)}}
+
| bgcolor="EEFFFF" | {{rl|Contact_Alignment_Recipes|Positive Resist (MA-6)}}  
 
| bgcolor="EEFFFF" |  
 
| bgcolor="EEFFFF" |  
 
| bgcolor="EEFFFF" |  
 
| bgcolor="EEFFFF" |  
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| bgcolor="EEFFFF" |  
 
| bgcolor="EEFFFF" |  
 
|-
 
|-
| bgcolor="#D0E7FF" align="center" | AZ4210
+
| bgcolor="#D0E7FF" align="center" | AZ4210  
| {{rl|Contact_Alignment_Recipes|Positive Resist (MJB-3)}}
+
| {{rl|Contact_Alignment_Recipes|Positive Resist (MJB-3)}}  
| {{rl|Contact_Alignment_Recipes|Positive Resist (MA-6)}}
+
| {{rl|Contact_Alignment_Recipes|Positive Resist (MA-6)}}  
 
| <br>  
 
| <br>  
 
| <br>  
 
| <br>  
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| <br>
 
| <br>
 
|-
 
|-
| bgcolor="#D0E7FF" align="center" | AZ4330RS
+
| bgcolor="#D0E7FF" align="center" | AZ4330RS  
| bgcolor="EEFFFF" | {{rl|Contact_Alignment_Recipes|Positive Resist (MJB-3)}}
+
| bgcolor="EEFFFF" | {{rl|Contact_Alignment_Recipes|Positive Resist (MJB-3)}}  
| bgcolor="EEFFFF" | {{rl|Contact_Alignment_Recipes|Positive Resist (MA-6)}}
+
| bgcolor="EEFFFF" | {{rl|Contact_Alignment_Recipes|Positive Resist (MA-6)}}  
 
| bgcolor="EEFFFF" |  
 
| bgcolor="EEFFFF" |  
 
| bgcolor="EEFFFF" |  
 
| bgcolor="EEFFFF" |  
Line 85: Line 109:
 
| bgcolor="EEFFFF" |  
 
| bgcolor="EEFFFF" |  
 
|-
 
|-
| bgcolor="#D0E7FF" align="center" | OCG 825-35CS
+
| bgcolor="#D0E7FF" align="center" | OCG 825-35CS  
 
| <br>  
 
| <br>  
 
| <br>  
 
| <br>  
Line 95: Line 119:
 
| <br>
 
| <br>
 
|-
 
|-
| bgcolor="#D0E7FF" align="center" | SPR 950-0.8
+
| bgcolor="#D0E7FF" align="center" | SPR 950-0.8  
 
| bgcolor="EEFFFF" |  
 
| bgcolor="EEFFFF" |  
 
| bgcolor="EEFFFF" |  
 
| bgcolor="EEFFFF" |  
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| bgcolor="EEFFFF" |  
 
| bgcolor="EEFFFF" |  
 
|-
 
|-
| bgcolor="#D0E7FF" align="center" | SPR 955 CM-0.9
+
| bgcolor="#D0E7FF" align="center" | SPR 955 CM-0.9  
 
| <br>  
 
| <br>  
 
| <br>  
 
| <br>  
 
| {{rl|Stepper Recipes|Positive Resist (GCA 6300)}}  
 
| {{rl|Stepper Recipes|Positive Resist (GCA 6300)}}  
| {{rl|Stepper Recipes|Positive Resist (AutoStep 200)}}
+
| {{rl|Stepper Recipes|Positive Resist (AutoStep 200)}}  
 
| <br>  
 
| <br>  
 
| <br>  
 
| <br>  
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| <br>
 
| <br>
 
|-
 
|-
| bgcolor="#D0E7FF" align="center" | SPR 955 CM-1.8
+
| bgcolor="#D0E7FF" align="center" | SPR 955 CM-1.8  
 
| bgcolor="EEFFFF" |  
 
| bgcolor="EEFFFF" |  
 
| bgcolor="EEFFFF" |  
 
| bgcolor="EEFFFF" |  
| bgcolor="EEFFFF" | {{rl|Stepper Recipes|Positive Resist (GCA 6300)}}
+
| bgcolor="EEFFFF" | {{rl|Stepper Recipes|Positive Resist (GCA 6300)}}  
| bgcolor="EEFFFF" | {{rl|Stepper Recipes|Positive Resist (AutoStep 200)}}
+
| bgcolor="EEFFFF" | {{rl|Stepper Recipes|Positive Resist (AutoStep 200)}}  
 
| bgcolor="EEFFFF" |  
 
| bgcolor="EEFFFF" |  
 
| bgcolor="EEFFFF" |  
 
| bgcolor="EEFFFF" |  
Line 125: Line 149:
 
| bgcolor="EEFFFF" |  
 
| bgcolor="EEFFFF" |  
 
|-
 
|-
| bgcolor="#D0E7FF" align="center" | SPR 220-3.0
+
| bgcolor="#D0E7FF" align="center" | SPR 220-3.0  
| {{rl|Contact_Alignment_Recipes|Positive Resist (MJB-3)}}
+
| {{rl|Contact_Alignment_Recipes|Positive Resist (MJB-3)}}  
| {{rl|Contact_Alignment_Recipes|Positive Resist (MA-6)}}
+
| {{rl|Contact_Alignment_Recipes|Positive Resist (MA-6)}}  
| {{rl|Stepper Recipes|Positive Resist (GCA 6300)}}
+
| {{rl|Stepper Recipes|Positive Resist (GCA 6300)}}  
| {{rl|Stepper Recipes|Positive Resist (AutoStep 200)}}
+
| {{rl|Stepper Recipes|Positive Resist (AutoStep 200)}}  
 
| <br>  
 
| <br>  
 
| <br>  
 
| <br>  
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| <br>
 
| <br>
 
|-
 
|-
| bgcolor="#D0E7FF" align="center" | SPR 220-7.0
+
| bgcolor="#D0E7FF" align="center" | SPR 220-7.0  
| bgcolor="EEFFFF" | {{rl|Contact_Alignment_Recipes|Positive Resist (MJB-3)}}
+
| bgcolor="EEFFFF" | {{rl|Contact_Alignment_Recipes|Positive Resist (MJB-3)}}  
| bgcolor="EEFFFF" | {{rl|Contact_Alignment_Recipes|Positive Resist (MA-6)}}
+
| bgcolor="EEFFFF" | {{rl|Contact_Alignment_Recipes|Positive Resist (MA-6)}}  
| bgcolor="EEFFFF" | {{rl|Stepper Recipes|Positive Resist (GCA 6300)}}
+
| bgcolor="EEFFFF" | {{rl|Stepper Recipes|Positive Resist (GCA 6300)}}  
| bgcolor="EEFFFF" | {{rl|Stepper Recipes|Positive Resist (AutoStep 200)}}
+
| bgcolor="EEFFFF" | {{rl|Stepper Recipes|Positive Resist (AutoStep 200)}}  
 
| bgcolor="EEFFFF" |  
 
| bgcolor="EEFFFF" |  
 
| bgcolor="EEFFFF" |  
 
| bgcolor="EEFFFF" |  
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| bgcolor="EEFFFF" |  
 
| bgcolor="EEFFFF" |  
 
|-
 
|-
| bgcolor="#D0E7FF" align="center" | THMR-IP3600 HP D
+
| bgcolor="#D0E7FF" align="center" | THMR-IP3600 HP D  
 
| <br>  
 
| <br>  
 
| <br>  
 
| <br>  
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| <br>
 
| <br>
 
|-
 
|-
| bgcolor="#D0E7FF" align="center" |UV6-0.7  
+
| bgcolor="#D0E7FF" align="center" | UV6-0.7  
 
| bgcolor="EEFFFF" |  
 
| bgcolor="EEFFFF" |  
 
| bgcolor="EEFFFF" |  
 
| bgcolor="EEFFFF" |  
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! bgcolor="#D0E7FF" align="center" | '''Negative Resists'''  
 
! bgcolor="#D0E7FF" align="center" | '''Negative Resists'''  
 
{{LithRecipe Table}}  
 
{{LithRecipe Table}}  
|-bgcolor="EEFFFF"
+
 
| bgcolor="#D0E7FF" align="center" | AZ5214-EIR
+
|- bgcolor="EEFFFF"
| {{rl|Contact_Alignment_Recipes|Negative Resist (MJB-3)}}
+
| bgcolor="#D0E7FF" align="center" | AZ5214-EIR  
| {{rl|Contact_Alignment_Recipes|Negative Resist (MA-6)}}
+
| {{rl|Contact_Alignment_Recipes|Negative Resist (MJB-3)}}  
| {{rl|Stepper Recipes|Negative Resist (GCA 6300)}}
+
| {{rl|Contact_Alignment_Recipes|Negative Resist (MA-6)}}  
| {{rl|Stepper Recipes|Negative Resist (AutoStep 200)}}
+
| {{rl|Stepper Recipes|Negative Resist (GCA 6300)}}  
 +
| {{rl|Stepper Recipes|Negative Resist (AutoStep 200)}}  
 
|  
 
|  
 
|  
 
|  
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|  
 
|  
 
|-
 
|-
| bgcolor="#D0E7FF" align="center" | AZnLOF 2020
+
| bgcolor="#D0E7FF" align="center" | AZnLOF 2020  
| {{rl|Contact_Alignment_Recipes|Positive Resist (MJB-3)}}
+
| {{rl|Contact_Alignment_Recipes|Positive Resist (MJB-3)}}  
| {{rl|Contact_Alignment_Recipes|Negative Resist (MA-6)}}
+
| {{rl|Contact_Alignment_Recipes|Negative Resist (MA-6)}}  
| {{rl|Stepper Recipes|Negative Resist (GCA 6300)}}
+
| {{rl|Stepper Recipes|Negative Resist (GCA 6300)}}  
| {{rl|Stepper Recipes|Negative Resist (AutoStep 200)}}
+
| {{rl|Stepper Recipes|Negative Resist (AutoStep 200)}}  
 
|  
 
|  
 
|  
 
|  
 
|  
 
|  
 
|  
 
|  
|-bgcolor="EEFFFF"
+
|- bgcolor="EEFFFF"
| bgcolor="#D0E7FF" align="center" | AZnLOF 2035
+
| bgcolor="#D0E7FF" align="center" | AZnLOF 2035  
 
|  
 
|  
 
|  
 
|  
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|  
 
|  
 
|-
 
|-
| bgcolor="#D0E7FF" align="center" | AZnLOF 2070
+
| bgcolor="#D0E7FF" align="center" | AZnLOF 2070  
 
|  
 
|  
 
|  
 
|  
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|  
 
|  
 
|  
 
|  
|-bgcolor="EEFFFF"
+
|- bgcolor="EEFFFF"
| bgcolor="#D0E7FF" align="center" | AZnLOF P5510
+
| bgcolor="#D0E7FF" align="center" | AZnLOF P5510  
 
|  
 
|  
 
|  
 
|  
| {{rl|Stepper Recipes|Negative Resist (GCA 6300)}}
+
| {{rl|Stepper Recipes|Negative Resist (GCA 6300)}}  
| {{rl|Stepper Recipes|Negative Resist (AutoStep 200)}}
+
| {{rl|Stepper Recipes|Negative Resist (AutoStep 200)}}  
 
|  
 
|  
 
|  
 
|  
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|  
 
|  
 
|-
 
|-
| bgcolor="#D0E7FF" align="center" | UVN30-0.5
+
| bgcolor="#D0E7FF" align="center" | UVN30-0.5  
 
|  
 
|  
 
|  
 
|  
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|  
 
|  
 
|  
 
|  
|-bgcolor="EEFFFF"
+
|- bgcolor="EEFFFF"
| bgcolor="#D0E7FF" align="center" | SU-8 2015
+
| bgcolor="#D0E7FF" align="center" | SU-8 2015  
 
|  
 
|  
 
|  
 
|  
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! bgcolor="#D0E7FF" align="center" | '''Underlayers'''  
 
! bgcolor="#D0E7FF" align="center" | '''Underlayers'''  
 
{{LithRecipe Table}}  
 
{{LithRecipe Table}}  
|-bgcolor="EEFFFF"
+
 
| bgcolor="#D0E7FF" align="center" | PMGI SF-11
+
|- bgcolor="EEFFFF"
 +
| bgcolor="#D0E7FF" align="center" | PMGI SF-11  
 
| <br>  
 
| <br>  
 
| <br>  
 
| <br>  
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| <br>
 
| <br>
 
|-
 
|-
| bgcolor="#D0E7FF" align="center" | PMGI SF-15
+
| bgcolor="#D0E7FF" align="center" | PMGI SF-15  
 
|  
 
|  
 
|  
 
|  
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|  
 
|  
 
|  
 
|  
 
 
|  
 
|  
 
|  
 
|  
|-bgcolor="EEFFFF"
+
|
| bgcolor="#D0E7FF" align="center" | LOL 2000
+
|- bgcolor="EEFFFF"
 +
| bgcolor="#D0E7FF" align="center" | LOL 2000  
 
|  
 
|  
 
|  
 
|  
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|  
 
|  
 
|-
 
|-
| bgcolor="#D0E7FF" align="center" | XHRIC-11 (BARC)
+
| bgcolor="#D0E7FF" align="center" | XHRIC-11 (BARC)  
 
|  
 
|  
 
|  
 
|  
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|  
 
|  
 
|  
 
|  
|-bgcolor="EEFFFF"
+
|- bgcolor="EEFFFF"
| bgcolor="#D0E7FF" align="center" | AR-2 (BARC)
+
| bgcolor="#D0E7FF" align="center" | AR-2 (BARC)  
 
|  
 
|  
 
|  
 
|  
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|  
 
|  
 
|-
 
|-
| bgcolor="#D0E7FF" align="center" | DS-K 101-307 (BARC)
+
| bgcolor="#D0E7FF" align="center" | DS-K 101-307 (BARC)  
 
|  
 
|  
 
|  
 
|  
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! bgcolor="#D0E7FF" align="center" | '''Overlayers'''  
 
! bgcolor="#D0E7FF" align="center" | '''Overlayers'''  
 
{{LithRecipe Table}}  
 
{{LithRecipe Table}}  
|-bgcolor="EEFFFF"
+
 
| bgcolor="#D0E7FF" align="center" | CEM-365 IS
+
|- bgcolor="EEFFFF"
 +
| bgcolor="#D0E7FF" align="center" | CEM-365 IS  
 
|  
 
|  
 
|  
 
|  
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! bgcolor="#D0E7FF" align="center" | '''E-Beam Resists'''  
 
! bgcolor="#D0E7FF" align="center" | '''E-Beam Resists'''  
 
{{LithRecipe Table}}  
 
{{LithRecipe Table}}  
 +
 
|- bgcolor="EEFFFF"
 
|- bgcolor="EEFFFF"
| bgcolor="#D0E7FF" align="center" | ??????
+
| bgcolor="#D0E7FF" align="center" | &nbsp;??????  
 +
|
 
|  
 
|  
 
|  
 
|  
Line 325: Line 354:
 
|  
 
|  
 
|  
 
|  
 
 
|-
 
|-
| bgcolor="#D0E7FF" align="center" | ???????
+
| bgcolor="#D0E7FF" align="center" | &nbsp;???????  
 
|  
 
|  
 
|  
 
|  
Line 339: Line 367:
 
! bgcolor="#D0E7FF" align="center" | '''Nanoimprint Resists'''  
 
! bgcolor="#D0E7FF" align="center" | '''Nanoimprint Resists'''  
 
{{LithRecipe Table}}  
 
{{LithRecipe Table}}  
 +
 
|- bgcolor="EEFFFF"
 
|- bgcolor="EEFFFF"
| bgcolor="#D0E7FF" align="center" | MR-I 7020
+
| bgcolor="#D0E7FF" align="center" | MR-I 7020  
 +
|
 
|  
 
|  
 
|  
 
|  
Line 348: Line 378:
 
|  
 
|  
 
|  
 
|  
 
 
|-
 
|-
| bgcolor="#D0E7FF" align="center" | Nanonex NX-1020
+
| bgcolor="#D0E7FF" align="center" | Nanonex NX-1020  
 
|  
 
|  
 
|  
 
|  
Line 361: Line 390:
 
|-
 
|-
 
! bgcolor="#D0E7FF" align="center" |  
 
! bgcolor="#D0E7FF" align="center" |  
{{LithRecipe Table}}
+
{{LithRecipe Table}}  
 +
 
 
|}
 
|}

Revision as of 13:58, 22 April 2013

Lift-Off Techniques

Chemical Datasheets

Positive Photoresists
Negative Photoresists
Underlayers
E-beam resists
Nanoimprinting
Contrast Enhancement Materials
Anti-Reflection Coatings
Developers
Photoresist Removers

Recipes

  • R = Recipe is available. Clicking this link will take you to the recipe.
  • A = Material is available for use, but no recipes are provided.
Lithography Recipes

Contact Aligners Steppers Flood Expose E-Beam Lithography
Positive Resists SUSS MJB-3 SUSS MA-6 Stepper 1
(GCA 6300)
Stepper 2
(AutoStep 200)
Stepper 3
(ASML DUV)
MLA150
(Heidelberg)


AZ4110 R R
AZ4210 R R





AZ4330RS R R
OCG 825-35CS







SPR 950-0.8
SPR 955 CM-0.9

R R



SPR 955 CM-1.8 R R
SPR 220-3.0 R R R R



SPR 220-7.0 R R R R
THMR-IP3600 HP D







UV6-0.7
Negative Resists SUSS MJB-3 SUSS MA-6 Stepper 1
(GCA 6300)
Stepper 2
(AutoStep 200)
Stepper 3
(ASML DUV)
MLA150
(Heidelberg)


AZ5214-EIR R R R R
AZnLOF 2020 R R R R
AZnLOF 2035
AZnLOF 2070
AZnLOF P5510 R R
UVN30-0.5
SU-8 2015
Underlayers SUSS MJB-3 SUSS MA-6 Stepper 1
(GCA 6300)
Stepper 2
(AutoStep 200)
Stepper 3
(ASML DUV)
MLA150
(Heidelberg)


PMGI SF-11







PMGI SF-15
LOL 2000
XHRIC-11 (BARC)
AR-2 (BARC)
DS-K 101-307 (BARC)
Overlayers SUSS MJB-3 SUSS MA-6 Stepper 1
(GCA 6300)
Stepper 2
(AutoStep 200)
Stepper 3
(ASML DUV)
MLA150
(Heidelberg)


CEM-365 IS
E-Beam Resists SUSS MJB-3 SUSS MA-6 Stepper 1
(GCA 6300)
Stepper 2
(AutoStep 200)
Stepper 3
(ASML DUV)
MLA150
(Heidelberg)


 ??????
 ???????
Nanoimprint Resists SUSS MJB-3 SUSS MA-6 Stepper 1
(GCA 6300)
Stepper 2
(AutoStep 200)
Stepper 3
(ASML DUV)
MLA150
(Heidelberg)


MR-I 7020
Nanonex NX-1020
SUSS MJB-3 SUSS MA-6 Stepper 1
(GCA 6300)
Stepper 2
(AutoStep 200)
Stepper 3
(ASML DUV)
MLA150
(Heidelberg)