Difference between revisions of "Lithography Recipes"
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(Created page with "{{WIP}} *ASML Recipes *GCA Stepper Recipes *Contact Lithography Recipes *Nanoimprint Recipes *Optical Bi-Layer Recipes *E-Beam Lithography Recipes …") |
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+ | ! width="1675" height="45" colspan="9" | <div style="font-size: 150%;">Lithography Recipes</div> |
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− | *[[ASML Recipes]] |
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+ | |- bgcolor="#D0E7FF" |
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− | *[[GCA Stepper Recipes]] |
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+ | | <!-- INTENTIONALLY LEFT BLANK --> <br> |
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− | *[[Contact Lithography Recipes]] |
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+ | ! bgcolor="#D0E7FF" align="center" colspan="2" | '''[[Contact Alignment Recipes|Contact Aligners]]''' |
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− | *[[Nanoimprint Recipes]] |
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+ | ! bgcolor="#D0E7FF" align="center" colspan="3" | '''[[Stepper Recipes|Steppers]]''' |
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− | *[[Optical Bi-Layer Recipes]] |
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+ | ! width="90" bgcolor="#D0E7FF" align="center" | '''[[Flood Exposure Recipes|Flood Expose]]''' |
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− | *[[E-Beam Lithography Recipes]] |
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+ | ! bgcolor="#D0E7FF" align="center" colspan="2" | '''[[E-Beam Lithography Recipes|E-Beam Lithography]]''' |
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− | *[[Lab Techniques]] |
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+ | |- |
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− | *[[Resist Stripping]] |
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+ | ! width="20" bgcolor="#D0E7FF" align="center" | '''Positive Resists''' |
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− | *[[Lithography Chemicals]] |
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+ | {{LithRecipe Table}} |
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+ | {{LithRecipe Table}} |
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+ | |} |
Revision as of 07:47, 21 August 2012
Lithography Recipes
| ||||||||
---|---|---|---|---|---|---|---|---|
Contact Aligners | Steppers | Flood Expose | E-Beam Lithography | |||||
Positive Resists | SUSS MJB-3 | SUSS MA-6 | Stepper 1 (GCA 6300) |
Stepper 2 (AutoStep 200) |
Stepper 3 (ASML DUV) |
MLA150 (Heidelberg) | ||
AZ4110 | ||||||||
AZ4210 | ||||||||
AZ4330RS | ||||||||
OCG 825-35CS | ||||||||
SPR 950-0.8 | ||||||||
SPR 955 CM-0.9 | ||||||||
SPR 955 CM-1.8 | ||||||||
SPR 220-3.0 | ||||||||
SPR 220-7.0 | ||||||||
THMR-IP3600 HP D | ||||||||
UV6-0.7 | ||||||||
Negative Resists | SUSS MJB-3 | SUSS MA-6 | Stepper 1 (GCA 6300) |
Stepper 2 (AutoStep 200) |
Stepper 3 (ASML DUV) |
MLA150 (Heidelberg) | ||
AZ5214-EIR | ||||||||
AZnLOF 2020 | ||||||||
AZnLOF 2035 | ||||||||
AZnLOF 2070 | ||||||||
AZnLOF P5510 | ||||||||
UVN30-0.5 | ||||||||
SU-8 2015 | ||||||||
SUSS MJB-3 | SUSS MA-6 | Stepper 1 (GCA 6300) |
Stepper 2 (AutoStep 200) |
Stepper 3 (ASML DUV) |
MLA150 (Heidelberg) |