LegacyTable

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Legacy Table

  • R = Recipe is available. Clicking this link will take you to the recipe.
  • A = Material is available for use, but no recipes are provided.


E-Beam Lithography Recipes

 Contact Aligners Steppers Flood Expose E-Beam Lithography
Positive Resists SUSS MJB-3 SUSS MA-6 Stepper 1
(GCA 6300) 		Stepper 2
(AutoStep 200) 		Stepper 3
(ASML DUV) 		DUV Flood Field Emission SEM 1
(FEI Sirion) 		E-Beam Lithography System
(JEOL JBX-6300FS)
AZ4110 R R A A
AZ4210 R R A A



AZ4330RS R R A A
OCG 825-35CS A A A A



SPR 950-0.8 A A A A
SPR 955 CM-0.9 A A R R



SPR 955 CM-1.8 A A R R
SPR 220-3.0 R R R R



SPR 220-7.0 R R R R
THMR-IP3600 HP D

A A



UV6-0.7 R
UV210-0.3 R
Negative Resists SUSS MJB-3 SUSS MA-6 Stepper 1
(GCA 6300) 		Stepper 2
(AutoStep 200) 		Stepper 3
(ASML DUV) 		DUV Flood Field Emission SEM 1
(FEI Sirion) 		E-Beam Lithography System
(JEOL JBX-6300FS)
AZ5214-EIR R R R R
AZnLOF 2020 R R R R
AZnLOF 2035 A A A A
AZnLOF 2070 A A A A
AZnLOF 5510 A A R R
UVN2300-0.5 R
SU-8 2015 A A A A
Underlayers SUSS MJB-3 SUSS MA-6 Stepper 1
(GCA 6300) 		Stepper 2
(AutoStep 200) 		Stepper 3
(ASML DUV) 		DUV Flood Field Emission SEM 1
(FEI Sirion) 		E-Beam Lithography System
(JEOL JBX-6300FS)
PMGI SF-11







PMGI SF-15
LOL 2000
XHRIC-11 (i-lineBARC)
AR-2 (DUV BARC)
DS-K101 (DUV BARC)
Overlayers SUSS MJB-3 SUSS MA-6 Stepper 1
(GCA 6300) 		Stepper 2
(AutoStep 200) 		Stepper 3
(ASML DUV) 		DUV Flood Field Emission SEM 1
(FEI Sirion) 		E-Beam Lithography System
(JEOL JBX-6300FS)
CEM-365 IS
E-Beam Resists SUSS MJB-3 SUSS MA-6 Stepper 1
(GCA 6300) 		Stepper 2
(AutoStep 200) 		Stepper 3
(ASML DUV) 		DUV Flood Field Emission SEM 1
(FEI Sirion) 		E-Beam Lithography System
(JEOL JBX-6300FS)
 ??????
 ???????
Nanoimprint Resists SUSS MJB-3 SUSS MA-6 Stepper 1
(GCA 6300) 		Stepper 2
(AutoStep 200) 		Stepper 3
(ASML DUV) 		DUV Flood Field Emission SEM 1
(FEI Sirion) 		E-Beam Lithography System
(JEOL JBX-6300FS)
MR-I 7020
Nanonex NX-1020
SUSS MJB-3 SUSS MA-6 Stepper 1
(GCA 6300) 		Stepper 2
(AutoStep 200) 		Stepper 3
(ASML DUV) 		DUV Flood Field Emission SEM 1
(FEI Sirion) 		E-Beam Lithography System
(JEOL JBX-6300FS)
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