Difference between revisions of "Lee Sawyer"

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(→‎Tools: Added and linked MA-6, MJBs, DUV, MVD and RIE 2 and 3 under my tools)
 
(8 intermediate revisions by 2 users not shown)
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{{staff|{{PAGENAME}}
 
{{staff|{{PAGENAME}}
|position  = Senior Development Engineer
+
|position  = Equipment Engineer
 
|room = 1109F
 
|room = 1109F
|phone = TBD
+
|phone = (805) 893-2123
 
|cell =  
 
|cell =  
 
|email = lee_sawyer@ucsb.edu
 
|email = lee_sawyer@ucsb.edu
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=Tools=
 
=Tools=
 
Lee Sawyer is in charge of the following tools:
 
Lee Sawyer is in charge of the following tools:
 +
{|
 +
|- valign="top"
 +
|
 
* [[Contact Aligner (SUSS MA-6)]]
 
* [[Contact Aligner (SUSS MA-6)]]
 
* [[Suss Aligners (SUSS MJB-3)]]
 
* [[Suss Aligners (SUSS MJB-3)]]
* [[IR Aligner (SUSS MJB-3 IR)]]
+
* [[Wafer Bonder (SUSS SB6-8E)]]
 
* [[DUV Flood Expose]]
 
* [[DUV Flood Expose]]
 
* [[Molecular Vapor Deposition]]
 
* [[Molecular Vapor Deposition]]
 +
* [[ICP Etch 1 (Panasonic E626I)]]
 
* [[RIE 2 (MRC)]]
 
* [[RIE 2 (MRC)]]
 
* [[RIE 3 (MRC)]]
 
* [[RIE 3 (MRC)]]
 +
||
 +
* [[UV Ozone Reactor]]
 +
* [[Plasma Activation (EVG 810)]]
 +
* [[Dicing Saw (ADT)]]
 +
* [[Goniometer (Rame-Hart A-100)]]
 +
* [[Plasma Clean (YES EcoClean)]]
 +
* [[Film Stress (Tencor Flexus)]]
 +
* [[Maskless Aligner (Heidelberg MLA150)]]
 +
* [[E-Beam 2 (Custom)]]
 +
|}

Latest revision as of 08:59, 28 October 2021