Difference between revisions of "Lee Sawyer"

From UCSB Nanofab Wiki
Jump to navigation Jump to search
(link to ma6)
 
(9 intermediate revisions by 2 users not shown)
Line 1: Line 1:
 
{{staff|{{PAGENAME}}
 
{{staff|{{PAGENAME}}
|position = Senior Development Engineer
+
|position = Equipment Engineer
 
|room = 1109F
 
|room = 1109F
|phone = TBD
+
|phone = (805) 893-2123
 
|cell =
 
|cell =
 
|email = lee_sawyer@ucsb.edu
 
|email = lee_sawyer@ucsb.edu
 
}}
 
}}
 
=About=
 
=About=
Testing...
 
   
 
=Current Work=
 
=Current Work=
Line 13: Line 12:
 
=Tools=
 
=Tools=
 
Lee Sawyer is in charge of the following tools:
 
Lee Sawyer is in charge of the following tools:
  +
{|
* [[Contact Aligner (SUSS MA-6)|Karl Suss MA6]]
 
  +
|- valign="top"
  +
|
 
* [[Contact Aligner (SUSS MA-6)]]
  +
* [[Suss Aligners (SUSS MJB-3)]]
  +
* [[Wafer Bonder (SUSS SB6-8E)]]
  +
* [[DUV Flood Expose]]
  +
* [[Molecular Vapor Deposition]]
  +
* [[ICP Etch 1 (Panasonic E626I)]]
  +
* [[RIE 2 (MRC)]]
  +
* [[RIE 3 (MRC)]]
  +
||
  +
* [[UV Ozone Reactor]]
  +
* [[Plasma Activation (EVG 810)]]
  +
* [[Dicing Saw (ADT)]]
  +
* [[Goniometer (Rame-Hart A-100)]]
  +
* [[Plasma Clean (YES EcoClean)]]
  +
* [[Film Stress (Tencor Flexus)]]
  +
* [[Maskless Aligner (Heidelberg MLA150)]]
  +
* [[E-Beam 2 (Custom)]]
  +
|}

Latest revision as of 09:59, 28 October 2021