Difference between revisions of "Lee Sawyer"
Jump to navigation
Jump to search
(→Tools: Added and linked MA-6, MJBs, DUV, MVD and RIE 2 and 3 under my tools) |
|||
(8 intermediate revisions by 2 users not shown) | |||
Line 1: | Line 1: | ||
{{staff|{{PAGENAME}} |
{{staff|{{PAGENAME}} |
||
− | |position = |
+ | |position = Equipment Engineer |
|room = 1109F |
|room = 1109F |
||
− | |phone = |
+ | |phone = (805) 893-2123 |
|cell = |
|cell = |
||
|email = lee_sawyer@ucsb.edu |
|email = lee_sawyer@ucsb.edu |
||
Line 12: | Line 12: | ||
=Tools= |
=Tools= |
||
Lee Sawyer is in charge of the following tools: |
Lee Sawyer is in charge of the following tools: |
||
+ | {| |
||
+ | |- valign="top" |
||
+ | | |
||
* [[Contact Aligner (SUSS MA-6)]] |
* [[Contact Aligner (SUSS MA-6)]] |
||
* [[Suss Aligners (SUSS MJB-3)]] |
* [[Suss Aligners (SUSS MJB-3)]] |
||
− | * [[ |
+ | * [[Wafer Bonder (SUSS SB6-8E)]] |
* [[DUV Flood Expose]] |
* [[DUV Flood Expose]] |
||
* [[Molecular Vapor Deposition]] |
* [[Molecular Vapor Deposition]] |
||
+ | * [[ICP Etch 1 (Panasonic E626I)]] |
||
* [[RIE 2 (MRC)]] |
* [[RIE 2 (MRC)]] |
||
* [[RIE 3 (MRC)]] |
* [[RIE 3 (MRC)]] |
||
+ | || |
||
+ | * [[UV Ozone Reactor]] |
||
+ | * [[Plasma Activation (EVG 810)]] |
||
+ | * [[Dicing Saw (ADT)]] |
||
+ | * [[Goniometer (Rame-Hart A-100)]] |
||
+ | * [[Plasma Clean (YES EcoClean)]] |
||
+ | * [[Film Stress (Tencor Flexus)]] |
||
+ | * [[Maskless Aligner (Heidelberg MLA150)]] |
||
+ | * [[E-Beam 2 (Custom)]] |
||
+ | |} |
Latest revision as of 09:59, 28 October 2021
|
About
Current Work
Tools
Lee Sawyer is in charge of the following tools: