Difference between revisions of "Lee Sawyer"
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* [[RIE 3 (MRC)]] |
* [[RIE 3 (MRC)]] |
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* [[UV Ozone Reactor]] |
* [[UV Ozone Reactor]] |
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| + | * [[Plasma Activation (EVG 810)]] |
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| + | * [[Dicing Saw (ADT)]] |
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| + | * [[Goniometer (Rame-Hart A-100)]] |
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| + | * [[Plasma Clean (YES EcoClean)]] |
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| + | * [[Film Stress (Tencor Flexus)]] |
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| + | * [[Maskless Aligner (Heidelberg MLA150)]] |
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Revision as of 20:40, 27 October 2021
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About
Current Work
Tools
Lee Sawyer is in charge of the following tools:
- Contact Aligner (SUSS MA-6)
- Suss Aligners (SUSS MJB-3)
- Wafer Bonder (SUSS SB6-8E)
- DUV Flood Expose
- Molecular Vapor Deposition
- ICP Etch 1 (Panasonic E626I)
- RIE 2 (MRC)
- RIE 3 (MRC)
- UV Ozone Reactor
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