Difference between revisions of "Laser Etch Monitoring"

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m (Monor removed Intellemetrics text die to Horiba and custom system.)
(listed which tools have which laser, added redlink to RIE5 lasermon procedure)
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Procedures for specific machines are found on the following pages:
 
Procedures for specific machines are found on the following pages:
 
* [[Intellemetrics Laser Etch Monitor Procedure for Panasonic ICP Etchers]]
 
* [[Intellemetrics Laser Etch Monitor Procedure for Panasonic ICP Etchers]]
 +
** Installed on [[ICP Etch 1 (Panasonic E626I)|Panasonic ICP #1]] & [[ICP Etch 2 (Panasonic E640)|ICP #2]]
 
* [[Intellemetrics Laser Etch Monitor Procedure for Plasma-Therm Etchers]]
 
* [[Intellemetrics Laser Etch Monitor Procedure for Plasma-Therm Etchers]]
 +
** Installed on [[DSEIII (PlasmaTherm/Deep Silicon Etcher)|Plasma-Therm DSE-iii]] and [[Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP)|Fluorine ICP Etcher]]
 
* [[Horiba Laser Etch Monitor Procedure for Unaxis VLR]]
 
* [[Horiba Laser Etch Monitor Procedure for Unaxis VLR]]
 
* [[Custom Laser Etch Monitor Procedure for RIE|Custom Laser Etch Monitor Procedure for RIE#2]]
 
* [[Custom Laser Etch Monitor Procedure for RIE|Custom Laser Etch Monitor Procedure for RIE#2]]
 +
* [[Laser Etch Monitor Procedure for RIE5|Laser Etch Monitor Procedure for RIE5]]
  
 
== References ==
 
== References ==

Revision as of 00:32, 22 August 2019

Laser Etch Monitoring
Intellemetrics LEP500 Photo.jpg
Tool Type Dry Etch
Location ICP1, ICP2, Fluorine Etcher, DSE-iii
Supervisor Demis D. John
Supervisor Phone (805) 893-5934
Supervisor E-Mail demis@ucsb.edu
Description Laser Endpoint Detection for Dry Etching
Manufacturer Intellemetrics
Model LEP 500
Dry Etch Recipes


Overview

A number of our dry etching systems have Laser Etch monitors installed, for "endpoint detection". These systems allow you to end your etch at a known etch depth, or within a certain layer (with some caveats). This nearly eliminates the need to calibrate etch rates or to use timed etching only, which is especially important in our lab where etch rates can vary depending on the previous etches performed in the chamber.

Laser Etch monitoring works similarly to optical thin-film measurement via reflectivity spectra (eg. like our Filmetrics systems). However, instead of varying the optical wavelength and measuring a fixed thin-film, we measure a constant wavelength and a thin-film that is varying as it is etched. Thus, similar to the thin-film measurements, you can only measure a useful signal when the optical properties (reflection or interference) change during your etch.

For example, Etching from high-reflectivity Aluminum to Lower reflectivity Silicon will usually give you a clear drop showing that your Aluminum has been fully etched-through.

Etching films that are transparent at the laser monitor wavelength (670nm) produces a sinusoidal signal due to optical wave interference which gives you numerous possible stopping points to end the etch upon.

Procedures

General Procedure

The basic method for performing an etch with laser monitoring endpoint, is as follows:

  1. Simulate or estimate what the laser monitor trace will look like, decide when to stop the etch according to the laser monitor plot.
  2. Mount the sample such that the laser will be able to reach a region to monitor the etch - typically ~100-300µm wide area.
  3. Load sample into chamber - wafer transfer only, no etch.
  4. Align Laser onto area to monitor using co-axial microscope.
  5. Start laser power monitoring/logging.
  6. Start Etch (time set longer than expected etch time) - etch only, no wafer transfers.
    1. Closely observe laser monitor plot, comparing to known/simulated plot.
  7. Use "Next Step" or "End Step" when appropriate laser monitor trace is reached. Wait for process to complete any final steps.
  8. Transfer wafer out of chamber.
  9. Save laser monitor data, turn off laser & microscope illumination.

Specific Procedures

Procedures for specific machines are found on the following pages:

References

See the following pages for more information about laser endpoint detection.