KLA Tencor P7 - Saving Profile Data

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Revision as of 22:48, 10 April 2019 by John d (talk | contribs) (last step to close APEX software)
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To save or export raw numeric data of a profile/scan.

  1. Click the "APEX" Analysis button to load the profile data in the APEX software.
    1. KLA-Tencor P7 - Saving Data - 1-APEX button.jpg
  2. Press Alt-Tab (maybe multiple times) to Switch to the APEX software, which launches in the background.
    1. KLA-Tencor P7 - Saving Data - 2-switch to APEX.jpg
  3. Go to the Studiables tab, and click "Save the Profile"
    1. KLA-Tencor P7 - Saving Data - 3-Apex Save the Studiable profile.jpg
  4. Save as file type "TXT - ASCII"
    1. KLA-Tencor P7 - Saving Data - 4-Save as TXT.jpg
  5. Choose your data options, typical parameters below:
    1. 5-Export Options.jpg
  6. When done, please Close the APEX software and switch back to the main profilometer software.
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