Difference between revisions of "KLA Tencor P7 - Saving Profile Data"

From UCSB Nanofab Wiki
Jump to navigation Jump to search
m (minor newline fix)
(Text replacement - "www.nanotech.ucsb.edu/wiki/" to "wiki.nanotech.ucsb.edu/wiki/")
(4 intermediate revisions by one other user not shown)
Line 1: Line 1:
 
''To save or export raw numeric data of a profile/scan.''
 
''To save or export raw numeric data of a profile/scan.''
# Click the "APEX" Analysis button to load the profile data in the APEX software. [[File:KLA-Tencor P7 - Saving Data - 1-APEX button.jpg|255x255px]]
+
# Click the "APEX" Analysis button to load the profile data in the APEX software.
# Press Alt-Tab (maybe multiple times) to Switch to the APEX software, which launches in the background. [[File:KLA-Tencor P7 - Saving Data - 2-switch to APEX.jpg|288x288px]]
+
## [[File:KLA-Tencor P7 - Saving Data - 1-APEX button.jpg|255x255px]]
  +
# Press Alt-Tab (maybe multiple times) to Switch to the APEX software, which launches in the background.
# Go to the '''''Studiables''''' tab, and click "'''''Save the Profile'''''" [[File:KLA-Tencor P7 - Saving Data - 3-Apex Save the Studiable profile.jpg|286x286px]]
 
# Save as file type "TXT - ASCII" [[File:KLA-Tencor P7 - Saving Data - 4-Save as TXT.jpg|391x391px]]
+
## [[File:KLA-Tencor P7 - Saving Data - 2-switch to APEX.jpg|288x288px]]
  +
# Go to the '''''Studiables''''' tab, and click "'''''Save the Profile'''''"
# Choose your data options, typical parameters below: [[File:5-Export Options.jpg|441x441px]]
 
 
## [[File:KLA-Tencor P7 - Saving Data - 3-Apex Save the Studiable profile.jpg|286x286px]]
  +
# Save as file type "TXT - ASCII"
  +
## [[File:KLA-Tencor P7 - Saving Data - 4-Save as TXT.jpg|391x391px]]
 
# Choose your data options, typical parameters below:
  +
## [[File:5-Export Options.jpg|441x441px]]
  +
# Save your data inside the "'''''USERS - NanoFiles'''''" folder (linked in the sidebar, desktop and Start bar), being sure to save within your group's folder (see [https://wiki.nanotech.ucsb.edu/wiki/index.php/Frequently_Asked_Questions#How_do_I_get_my_files_from_the_NanoFab_computers.3F here] for more info).
  +
# When done, please '''Close the APEX software''' and switch back to the main profilometer software.

Revision as of 18:26, 6 April 2020

To save or export raw numeric data of a profile/scan.

  1. Click the "APEX" Analysis button to load the profile data in the APEX software.
    1. KLA-Tencor P7 - Saving Data - 1-APEX button.jpg
  2. Press Alt-Tab (maybe multiple times) to Switch to the APEX software, which launches in the background.
    1. KLA-Tencor P7 - Saving Data - 2-switch to APEX.jpg
  3. Go to the Studiables tab, and click "Save the Profile"
    1. KLA-Tencor P7 - Saving Data - 3-Apex Save the Studiable profile.jpg
  4. Save as file type "TXT - ASCII"
    1. KLA-Tencor P7 - Saving Data - 4-Save as TXT.jpg
  5. Choose your data options, typical parameters below:
    1. 5-Export Options.jpg
  6. Save your data inside the "USERS - NanoFiles" folder (linked in the sidebar, desktop and Start bar), being sure to save within your group's folder (see here for more info).
  7. When done, please Close the APEX software and switch back to the main profilometer software.