Difference between revisions of "KLA Tencor P7 - Saving Profile Data"
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(Added screenshots and instructions for using APEX to save profile data) |
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''To save or export raw numeric data of a profile/scan.'' |
''To save or export raw numeric data of a profile/scan.'' |
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# Click the "APEX" Analysis button to load the profile data in the APEX software. [[File:KLA-Tencor P7 - Saving Data - 1-APEX button.jpg|255x255px]] |
# Click the "APEX" Analysis button to load the profile data in the APEX software. [[File:KLA-Tencor P7 - Saving Data - 1-APEX button.jpg|255x255px]] |
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| − | # Press Alt-Tab (maybe multiple times) to Switch to the APEX software, which launches in the background. |
+ | # Press Alt-Tab (maybe multiple times) to Switch to the APEX software, which launches in the background. [[File:KLA-Tencor P7 - Saving Data - 2-switch to APEX.jpg|288x288px]] |
# Go to the '''''Studiables''''' tab, and click "'''''Save the Profile'''''" [[File:KLA-Tencor P7 - Saving Data - 3-Apex Save the Studiable profile.jpg|286x286px]] |
# Go to the '''''Studiables''''' tab, and click "'''''Save the Profile'''''" [[File:KLA-Tencor P7 - Saving Data - 3-Apex Save the Studiable profile.jpg|286x286px]] |
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# Save as file type "TXT - ASCII" [[File:KLA-Tencor P7 - Saving Data - 4-Save as TXT.jpg|391x391px]] |
# Save as file type "TXT - ASCII" [[File:KLA-Tencor P7 - Saving Data - 4-Save as TXT.jpg|391x391px]] |
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Revision as of 22:34, 10 April 2019
To save or export raw numeric data of a profile/scan.
- Click the "APEX" Analysis button to load the profile data in the APEX software.
- Press Alt-Tab (maybe multiple times) to Switch to the APEX software, which launches in the background.
- Go to the Studiables tab, and click "Save the Profile"
- Save as file type "TXT - ASCII"
- Choose your data options, typical parameters below:
