Difference between revisions of "InP Etch Rate and Selectivity (InP/SiO2)"
Jump to navigation
Jump to search
(add SEM) |
(Text replacement - "www.nanotech.ucsb.edu/wiki/" to "wiki.nanotech.ucsb.edu/wiki/") |
||
| Line 13: | Line 13: | ||
|0.92 |
|0.92 |
||
|8.9 |
|8.9 |
||
| − | |[https:// |
+ | |[https://wiki.nanotech.ucsb.edu/wiki/images/9/9b/IP161332.pdf] |
|- |
|- |
||
|12/1/2016 |
|12/1/2016 |
||
| Line 19: | Line 19: | ||
|0.96 |
|0.96 |
||
|12.1 |
|12.1 |
||
| − | |[https:// |
+ | |[https://wiki.nanotech.ucsb.edu/wiki/images/e/ed/IP161421.pdf] |
|- |
|- |
||
|12/15/2016 |
|12/15/2016 |
||
| Line 25: | Line 25: | ||
|0.91 |
|0.91 |
||
|9.3 |
|9.3 |
||
| − | |[https:// |
+ | |[https://wiki.nanotech.ucsb.edu/wiki/images/6/64/IP161510.pdf] |
|- |
|- |
||
|1/23/2017 |
|1/23/2017 |
||
| Line 31: | Line 31: | ||
|0.93 |
|0.93 |
||
|9.4 |
|9.4 |
||
| − | |[https:// |
+ | |[https://wiki.nanotech.ucsb.edu/wiki/images/7/7f/IP170106.pdf] |
|- |
|- |
||
|2/7/2017 |
|2/7/2017 |
||
| Line 37: | Line 37: | ||
|0.75 |
|0.75 |
||
|7.7 |
|7.7 |
||
| − | |[https:// |
+ | |[https://wiki.nanotech.ucsb.edu/wiki/images/2/2f/IP170208.pdf] |
|- |
|- |
||
|2/21/2017 |
|2/21/2017 |
||
| Line 43: | Line 43: | ||
|0.91 |
|0.91 |
||
|11.3 |
|11.3 |
||
| − | |[https:// |
+ | |[https://wiki.nanotech.ucsb.edu/wiki/images/b/b8/IP170302.pdf] |
|- |
|- |
||
|3/21/2017 |
|3/21/2017 |
||
| Line 49: | Line 49: | ||
|1.01 |
|1.01 |
||
|11.3 |
|11.3 |
||
| − | |[https:// |
+ | |[https://wiki.nanotech.ucsb.edu/wiki/images/f/fd/IP170404.pdf] |
|- |
|- |
||
|4/20/2017 |
|4/20/2017 |
||
| Line 55: | Line 55: | ||
|0.88 |
|0.88 |
||
|10.2 |
|10.2 |
||
| − | |[https:// |
+ | |[https://wiki.nanotech.ucsb.edu/wiki/images/5/5b/IP170505.pdf] |
|- |
|- |
||
|5/4/2017 |
|5/4/2017 |
||
| Line 61: | Line 61: | ||
|0.84 |
|0.84 |
||
|11 |
|11 |
||
| − | |[https:// |
+ | |[https://wiki.nanotech.ucsb.edu/wiki/images/d/d1/IP170603.pdf] |
|- |
|- |
||
|5/19/2017 |
|5/19/2017 |
||
| Line 67: | Line 67: | ||
|0.82 |
|0.82 |
||
|9.9 |
|9.9 |
||
| − | |[https:// |
+ | |[https://wiki.nanotech.ucsb.edu/wiki/images/7/7f/IP170706.pdf] |
|- |
|- |
||
|7/6/2017 |
|7/6/2017 |
||
| Line 73: | Line 73: | ||
|0.98 |
|0.98 |
||
|12.1 |
|12.1 |
||
| − | |[https:// |
+ | |[https://wiki.nanotech.ucsb.edu/wiki/images/a/ac/IP172520.pdf] |
|- |
|- |
||
|8/16/2017 |
|8/16/2017 |
||
| Line 79: | Line 79: | ||
|0.76 |
|0.76 |
||
|8 |
|8 |
||
| − | |[https:// |
+ | |[https://wiki.nanotech.ucsb.edu/wiki/images/f/fa/IP172805.pdf] |
|- |
|- |
||
|8/28/2017 |
|8/28/2017 |
||
| Line 85: | Line 85: | ||
|1 |
|1 |
||
|11.7 |
|11.7 |
||
| − | |[https:// |
+ | |[https://wiki.nanotech.ucsb.edu/wiki/images/a/aa/IP172905.pdf] |
|- |
|- |
||
|10/11/2017 |
|10/11/2017 |
||
| Line 91: | Line 91: | ||
|1 |
|1 |
||
|11 |
|11 |
||
| − | |[https:// |
+ | |[https://wiki.nanotech.ucsb.edu/wiki/images/9/97/IP173009.pdf] |
|- |
|- |
||
|10/23/2017 |
|10/23/2017 |
||
| Line 97: | Line 97: | ||
|1.11 |
|1.11 |
||
|13.1 |
|13.1 |
||
| − | |[https:// |
+ | |[https://wiki.nanotech.ucsb.edu/wiki/images/4/41/IP173107.pdf] |
|- |
|- |
||
|11/21/2017 |
|11/21/2017 |
||
| Line 103: | Line 103: | ||
|1.04 |
|1.04 |
||
|12.1 |
|12.1 |
||
| − | |[https:// |
+ | |[https://wiki.nanotech.ucsb.edu/wiki/images/0/02/IP173203.pdf] |
|- |
|- |
||
|12/7/2017 |
|12/7/2017 |
||
| Line 109: | Line 109: | ||
|0.96 |
|0.96 |
||
|10.4 |
|10.4 |
||
| − | |[https:// |
+ | |[https://wiki.nanotech.ucsb.edu/wiki/images/0/03/IP173306.pdf] |
|- |
|- |
||
|1/2/2018 |
|1/2/2018 |
||
| Line 115: | Line 115: | ||
|1.44 |
|1.44 |
||
|14.3 |
|14.3 |
||
| − | |[https:// |
+ | |[https://wiki.nanotech.ucsb.edu/wiki/images/0/0d/IP180104.pdf] |
|- |
|- |
||
|3/1/2018 |
|3/1/2018 |
||
| Line 121: | Line 121: | ||
|0.96 |
|0.96 |
||
|9 |
|9 |
||
| − | |[https:// |
+ | |[https://wiki.nanotech.ucsb.edu/wiki/images/6/65/IP180207.pdf] |
|- |
|- |
||
|4/5/2018 |
|4/5/2018 |
||
| Line 127: | Line 127: | ||
|1.05 |
|1.05 |
||
|11.9 |
|11.9 |
||
| − | |[https:// |
+ | |[https://wiki.nanotech.ucsb.edu/wiki/images/c/c7/IP180304.pdf] |
|- |
|- |
||
|4/10/2018 |
|4/10/2018 |
||
| Line 133: | Line 133: | ||
|1.12 |
|1.12 |
||
|12.8 |
|12.8 |
||
| − | |[https:// |
+ | |[https://wiki.nanotech.ucsb.edu/wiki/images/1/17/IP180406.pdf] |
|- |
|- |
||
|4/26/2018 |
|4/26/2018 |
||
| Line 139: | Line 139: | ||
|1.29 |
|1.29 |
||
|13.6 |
|13.6 |
||
| − | |[https:// |
+ | |[https://wiki.nanotech.ucsb.edu/wiki/images/c/c8/IP180508.pdf] |
|- |
|- |
||
|5/22/2018 |
|5/22/2018 |
||
| Line 145: | Line 145: | ||
|0.88 |
|0.88 |
||
|8.4 |
|8.4 |
||
| − | |[https:// |
+ | |[https://wiki.nanotech.ucsb.edu/wiki/images/e/e1/IP180606.pdf] |
|- |
|- |
||
|8/7/2018 |
|8/7/2018 |
||
| Line 151: | Line 151: | ||
|0.81 |
|0.81 |
||
|8.0 |
|8.0 |
||
| − | |[https:// |
+ | |[https://wiki.nanotech.ucsb.edu/wiki/images/f/fb/IP180705.pdf] |
|- |
|- |
||
|10/3/2018 |
|10/3/2018 |
||
| Line 157: | Line 157: | ||
|1.01 |
|1.01 |
||
|13.7 |
|13.7 |
||
| − | |[https:// |
+ | |[https://wiki.nanotech.ucsb.edu/wiki/images/e/e5/IP180805.pdf] |
|- |
|- |
||
|12/10/2018 |
|12/10/2018 |
||
| Line 163: | Line 163: | ||
|1.01 |
|1.01 |
||
|11.4 |
|11.4 |
||
| − | |[https:// |
+ | |[https://wiki.nanotech.ucsb.edu/wiki/images/8/84/IP180909.pdf] |
|- |
|- |
||
|1/31/2019 |
|1/31/2019 |
||
| Line 169: | Line 169: | ||
|0.88 |
|0.88 |
||
|9.7 |
|9.7 |
||
| − | |[https:// |
+ | |[https://wiki.nanotech.ucsb.edu/wiki/images/b/b7/IP190101.pdf][https://wiki.nanotech.ucsb.edu/wiki/images/0/06/IP190103.pdf] |
|} |
|} |
||
Revision as of 18:35, 6 April 2020
| 1.4 mT, 125/800W, Cl2/H2/Ar flow-rate=6.3/12.7/2 sccm, chuck temperature=200 C, and etch time=90s (Prior to the etch, do O2 plasma chamber clean for 15 minutes, then, chamber coating with the same recipe and a quarter dummy InP on carrier for 15 minutes. | ||||
| Date | Sample# | InP Etch Rate (um/min) | Selectivity (InP/SiO2) | Profile SEM Picture |
| 10/4/2016 | InP#1613 | 0.92 | 8.9 | [1] |
| 12/1/2016 | InP#1614 | 0.96 | 12.1 | [2] |
| 12/15/2016 | InP#1615 | 0.91 | 9.3 | [3] |
| 1/23/2017 | InP#1701 | 0.93 | 9.4 | [4] |
| 2/7/2017 | InP#1702 | 0.75 | 7.7 | [5] |
| 2/21/2017 | InP#1703 | 0.91 | 11.3 | [6] |
| 3/21/2017 | InP#1704 | 1.01 | 11.3 | [7] |
| 4/20/2017 | inP#1705 | 0.88 | 10.2 | [8] |
| 5/4/2017 | InP#1706 | 0.84 | 11 | [9] |
| 5/19/2017 | InP#1707 | 0.82 | 9.9 | [10] |
| 7/6/2017 | InP#1708 | 0.98 | 12.1 | [11] |
| 8/16/2017 | InP#1709 | 0.76 | 8 | [12] |
| 8/28/2017 | InP#1710 | 1 | 11.7 | [13] |
| 10/11/2017 | InP#1711 | 1 | 11 | [14] |
| 10/23/2017 | InP#1712 | 1.11 | 13.1 | [15] |
| 11/21/2017 | InP#1713 | 1.04 | 12.1 | [16] |
| 12/7/2017 | InP#1714 | 0.96 | 10.4 | [17] |
| 1/2/2018 | InP#1801 | 1.44 | 14.3 | [18] |
| 3/1/2018 | InP#1802 | 0.96 | 9 | [19] |
| 4/5/2018 | InP#1803 | 1.05 | 11.9 | [20] |
| 4/10/2018 | InP#1804 | 1.12 | 12.8 | [21] |
| 4/26/2018 | InP#1805 | 1.29 | 13.6 | [22] |
| 5/22/2018 | InP#1806 | 0.88 | 8.4 | [23] |
| 8/7/2018 | InP#1807 | 0.81 | 8.0 | [24] |
| 10/3/2018 | InP#1808 | 1.01 | 13.7 | [25] |
| 12/10/2018 | InP#1809 | 1.01 | 11.4 | [26] |
| 1/31/2019 | InP#1901 | 0.88 | 9.7 | [27][28] |