ICP Etching Recipes
Revision as of 15:04, 22 October 2013 by Thibeault (talk | contribs) (→ICP Etch 1 (Panasonic E626I))
Back to Dry Etching Recipes.
Si Deep RIE (PlasmaTherm/Bosch Etch)
Single-step Si Etching (not Bosch Process!) (Si Deep RIE)
ICP Etch 1 (Panasonic E626I)
SiO2 Etching (Panasonic 1)
SiNx Etching (Panasonic 1)
- [[media:Panasonic1-SiN-Etch-Plasma-CF4-O2-ICP-revA.pdf|SiNx Etch Rates and Variations - CF4]-O2]