ICP Etching Recipes
From UCSB Nanofab Wiki
Revision as of 15:52, 27 September 2013 by
Thibeault
(
talk
|
contribs
)
(
→ICP Etch 1 (Panasonic E626I)
)
(
diff
)
← Older revision
|
Latest revision
(
diff
) |
Newer revision →
(
diff
)
Jump to navigation
Jump to search
Back to
Dry Etching Recipes
.
Contents
1
Si Deep RIE (PlasmaTherm/Bosch Etch)
1.1
Single-step Si Etching (not Bosch Process!) (Si Deep RIE)
2
ICP Etch 1 (Panasonic E626I)
2.1
SiO
2
Etching (Panasonic 1)
2.2
Al Etch (Panasonic 1)
2.3
Cr Etch (Panasonic 1)
2.4
Ti Etch (Panasonic 1)
2.5
GaN Etch (Panasonic 1)
3
ICP Etch 2 (Panasonic E640)
3.1
SiO
2
Etching (Panasonic 2)
3.2
Al Etch (Panasonic 2)
4
ICP-Etch (Unaxis VLR)
4.1
InP Etch (Unaxis VLR)
4.1.1
InP Etch
4.1.2
InP Etch (H
2
Ar)
4.2
GaN Etch (Unaxis VLR)
Si Deep RIE (PlasmaTherm/Bosch Etch)
Single-step Si Etching (not Bosch Process!) (Si Deep RIE)
Single-step Si Vertical Etch Recipe
ICP Etch 1 (Panasonic E626I)
SiO
2
Etching (Panasonic 1)
SiO
2
Vertical Etch Recipe Parameters
SiO
2
CHF3 Etch Variations
Al Etch (Panasonic 1)
Al Etch Recipes
Cr Etch (Panasonic 1)
Cr Etch Recipes
Ti Etch (Panasonic 1)
Ti Deep Etch Recipes
GaN Etch (Panasonic 1)
GaN Etch Recipes
ICP Etch 2 (Panasonic E640)
SiO
2
Etching (Panasonic 2)
SiO
2
Vertical Etch Recipe
Al Etch (Panasonic 2)
Al Etch Recipes - use panasonic 1 parameters, etch rate 50% higher
ICP-Etch (Unaxis VLR)
InP Etch (Unaxis VLR)
InP Etch
InP Etch Recipe (200C)
InP Etch (H
2
Ar)
InP Etch Recipe (H
2
Ar 200C)
GaN Etch (Unaxis VLR)
GaN Etch Recipe (85C)
Category
:
Recipes
Navigation menu
Personal tools
Create account
Log in
Namespaces
Page
Discussion
Variants
Views
Read
View source
View history
More
Search
InvisibleMenu
QuickLinks
Lab Rules
Common Questions/FAQ
Staff List
Equipment Signup
Chemicals + MSDS
Equipment
Full Tool List
Lithography
Vacuum Deposition
Dry Etch
Wet Processing
Thermal Processing
Packaging
Metrology & Test
Recipes and Data
Lithography
Vacuum Deposition
Dry Etching
Wet Etching
Thermal Processing
Packaging Tools
Data + Info
Process Control Data
Calculators/Utilities
NanoFab Info
Research + Pubs
Tech Talks
Tools
What links here
Related changes
Special pages
Printable version
Permanent link
Page information