ICP Etching Recipes
Revision as of 11:20, 30 August 2013 by Thibeault (talk | contribs) (→SiO2 Vertical Etch (Panasonic 1))
Back to Dry Etching Recipes.
ICP Etch 1 (Panasonic E626I)
SiO2 Vertical Etch (Panasonic 1)
SiO2 Pure CHF3 Etch Recipe Variations (Panasonic 1)
- [[media:==SiO2 Vertical Etch (Panasonic 1)|SiO2 Vertical Etch Recipe]]