ICP Etching Recipes

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Back to Dry Etching Recipes.

ICP Etch 1 (Panasonic E626I)

SiO₂ Vertical Etch (Panasonic 1)

SiO₂ Vertical Etch Recipe

ICP Etch 2 (Panasonic E640)

SiOx Vertical Etch (Panasonic 2)

SiOx Vertical Etch Recipe

ICP-Etch (Unaxis VLR)

InP Etch (Unaxis VLR)

InP Etch

InP Etch Recipe (200C)

InP Etch (H₂ Ar)

InP Etch Recipe (H₂ Ar 200C)

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Recipes