Difference between revisions of "ICP Etching Recipes"
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==AlGaAs Etch (Panasonic 1)== |
==AlGaAs Etch (Panasonic 1)== |
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− | *[[media:|AlGaAs Etch Recipes]] |
+ | *[[media:12-Plasma_Etching_of_AlGaAs-Panasonic_ICP-1-Etcher.pdf|AlGaAs Etch Recipes]] |
==GaN Etch (Panasonic 1)== |
==GaN Etch (Panasonic 1)== |
Revision as of 10:59, 2 October 2013
Back to Dry Etching Recipes.