Difference between revisions of "ICP Etching Recipes"
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*[[media:UNAXIS-VLR-InP-Etch-Ar-200C-Recipe.pdf|InP Etch Recipe (H<sub>2</sub> Ar 200C)]] |
*[[media:UNAXIS-VLR-InP-Etch-Ar-200C-Recipe.pdf|InP Etch Recipe (H<sub>2</sub> Ar 200C)]] |
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==GaN Etch (Unaxis VLR)== |
==GaN Etch (Unaxis VLR)== |
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| − | *[[media:|GaN Etch Recipe (85C)]] |
+ | *[[media:09-Plasma_Etching_of_GaN-UnaxisPM1.pdf|GaN Etch Recipe (85C)]] |
Revision as of 14:14, 24 September 2013
Back to Dry Etching Recipes.