Difference between revisions of "ICP Etching Recipes"
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+ | =[[XeF2 Etch (Xetch))]]= |
*[[media:06-XeF2-etch-recipe.pdf|Si Etch Recipe]] |
*[[media:06-XeF2-etch-recipe.pdf|Si Etch Recipe]] |
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Revision as of 15:51, 18 September 2013
Back to Dry Etching Recipes.
ICP Etch 1 (Panasonic E626I)
SiO2 Etching (Panasonic 1)
Cr Etch (Panasonic 1)
GaN Etch (Panasonic 1)
ICP Etch 2 (Panasonic E640)
SiO2 Etching (Panasonic 2)
ICP-Etch (Unaxis VLR)
InP Etch (Unaxis VLR)
InP Etch
InP Etch (H2 Ar)