Difference between revisions of "ICP Etching Recipes"
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*[[media:UNAXIS-VLR-InP-Etch-Ar-200C-Recipe.pdf|InP Etch Recipe (H<sub>2</sub> Ar 200C)]] |
*[[media:UNAXIS-VLR-InP-Etch-Ar-200C-Recipe.pdf|InP Etch Recipe (H<sub>2</sub> Ar 200C)]] |
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| + | =[[Si-Etch (XeF2 Etch (Xetch))]]= |
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==Si Etch (XeF2 Etch (Xetch))== |
==Si Etch (XeF2 Etch (Xetch))== |
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| + | ===Si Etch === |
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*[[media:06-XeF2-etch-recipe.pdf|Si Etch Recipe]] |
*[[media:06-XeF2-etch-recipe.pdf|Si Etch Recipe]] |
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Revision as of 11:42, 17 September 2013
Back to Dry Etching Recipes.