Difference between revisions of "ICP Etching Recipes"
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==SiO<sub>2</sub> Vertical Etch (Panasonic 1)== |
==SiO<sub>2</sub> Vertical Etch (Panasonic 1)== |
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*[[media:Panasonic1-SiO-Etch.pdf|SiO<sub>2</sub> Vertical Etch Recipe]] |
*[[media:Panasonic1-SiO-Etch.pdf|SiO<sub>2</sub> Vertical Etch Recipe]] |
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| − | *[[media:Panasonic1-SiO-Etch-SEM.pdf|SiO<sub>2</sub> |
+ | *[[media:Panasonic1-SiO-Etch-SEM.pdf|SiO<sub>2</sub> Vertical Etch SEM ]] |
==Cr Etch (Panasonic 1)== |
==Cr Etch (Panasonic 1)== |
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Revision as of 10:46, 21 August 2013
Back to Dry Etching Recipes.