Difference between revisions of "ICP Etching Recipes"

From UCSB Nanofab Wiki
Jump to navigation Jump to search
Line 3: Line 3:
 
==SiO<sub>2</sub> Vertical Etch (Panasonic 1)==
 
==SiO<sub>2</sub> Vertical Etch (Panasonic 1)==
 
*[[media:Panasonic1-SiO-Etch.pdf|SiO<sub>2</sub> Vertical Etch Recipe]]
 
*[[media:Panasonic1-SiO-Etch.pdf|SiO<sub>2</sub> Vertical Etch Recipe]]
 +
*[[media:CrEtch(Panasonic1).pdf|Cr Etch Recipes]]
  
 
=[[ICP Etch 2 (Panasonic E640)]]=
 
=[[ICP Etch 2 (Panasonic E640)]]=

Revision as of 13:54, 18 June 2013