Difference between revisions of "ICP Etching Recipes"
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==SiO<sub>2</sub> Vertical Etch (Panasonic 1)== |
==SiO<sub>2</sub> Vertical Etch (Panasonic 1)== |
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*[[media:Panasonic1-SiO-Etch.pdf|SiO<sub>2</sub> Vertical Etch Recipe]] |
*[[media:Panasonic1-SiO-Etch.pdf|SiO<sub>2</sub> Vertical Etch Recipe]] |
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| + | *[[media:CrEtch(Panasonic1).pdf|Cr Etch Recipes]] |
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=[[ICP Etch 2 (Panasonic E640)]]= |
=[[ICP Etch 2 (Panasonic E640)]]= |
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Revision as of 13:54, 18 June 2013
Back to Dry Etching Recipes.