Difference between revisions of "ICP Etching Recipes"
Jump to navigation
Jump to search
| Line 9: | Line 9: | ||
=[[ICP-Etch (Unaxis VLR)]]= |
=[[ICP-Etch (Unaxis VLR)]]= |
||
| + | ==InP Etch (Unaxis VLR)== |
||
| + | ===InP Etch === |
||
| + | *[[media:UNAXIS-VLR-InP-Etch-200C-Recipe.pdf|InP Etch Recipe (200C)]] |
||
| + | ===InP Etch (H<sub>2</sub> Ar)=== |
||
| + | *[[media:UNAXIS-VLR-InP-Etch-Ar-200C-Recipe.pdf|InP Etch Recipe (H<sub>2</sub> Ar 200C)]] |
||
Revision as of 13:12, 20 August 2012
Back to Dry Etching Recipes.