Difference between revisions of "ICP Etching Recipes"
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=[[ICP Etch 2 (Panasonic E640)]]= |
=[[ICP Etch 2 (Panasonic E640)]]= |
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| + | ==SiOx Vertical Etch== |
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| + | *[[media:Panasonic2-SiOx-Recipe.pdf|SiOx Vertical Etch Recipe]] |
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| + | |||
=[[ICP-Etch (Unaxis VLR)]]= |
=[[ICP-Etch (Unaxis VLR)]]= |
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Revision as of 08:58, 20 August 2012
Back to Dry Etching Recipes.