Difference between revisions of "ICP Etching Recipes"
Jump to navigation
Jump to search
(Created page with "{{recipes}} =ICP Etch 1 (Panasonic E626I)= =ICP Etch 2 (Panasonic E640)= =ICP-Etch (Unaxis VLR)=") |
|||
| Line 1: | Line 1: | ||
| − | {{recipes}} |
+ | {{recipes|Dry Etching}} |
=[[ICP Etch 1 (Panasonic E626I)]]= |
=[[ICP Etch 1 (Panasonic E626I)]]= |
||
=[[ICP Etch 2 (Panasonic E640)]]= |
=[[ICP Etch 2 (Panasonic E640)]]= |
||