Difference between revisions of "ICP Etching Recipes"
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==SiN<sub>x</sub> Etching (Panasonic 1)== |
==SiN<sub>x</sub> Etching (Panasonic 1)== |
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− | *[[media:Panasonic1-SiN-Etch-Plasma-CF4-O2-ICP-revA.pdf|SiN<sub>x</sub> Etch Rates and Variations - CF<sub>4</sub> |
+ | *[[media:Panasonic1-SiN-Etch-Plasma-CF4-O2-ICP-revA.pdf|SiN<sub>x</sub> Etch Rates and Variations - CF<sub>4</sub>-O<sub>2</sub>]] |
==Al Etch (Panasonic 1)== |
==Al Etch (Panasonic 1)== |
Revision as of 15:05, 22 October 2013
Back to Dry Etching Recipes.