Difference between revisions of "ICP Etching Recipes"
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==GaAs Etch (Panasonic 2)== |
==GaAs Etch (Panasonic 2)== |
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− | *[[media:|GaAs Etch Recipes - Panasonic 2 ]] |
+ | *[[media:16-GaAs_etch-ICP-2.pdf|GaAs Etch Recipes - Panasonic 2 ]] |
=[[ICP-Etch (Unaxis VLR)]]= |
=[[ICP-Etch (Unaxis VLR)]]= |
Revision as of 16:11, 2 October 2013
Back to Dry Etching Recipes.