Difference between revisions of "ICP Etching Recipes"
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=[[RIE Etch 5 (RIE#5)]]= |
=[[RIE Etch 5 (RIE#5)]]= |
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==GaN Etching (RIE#5)== |
==GaN Etching (RIE#5)== |
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| − | *[[media:|GaN Etch Recipe]] |
+ | *[[media:08-Plasma_Etching_of_GaN-RIE5.pdf|GaN Etch Recipe]] |
=[[ICP Etch 1 (Panasonic E626I)]]= |
=[[ICP Etch 1 (Panasonic E626I)]]= |
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Revision as of 15:41, 19 September 2013
Back to Dry Etching Recipes.