Difference between revisions of "ICP Etching Recipes"
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=[[ICP Etch 2 (Panasonic E640)]]= |
=[[ICP Etch 2 (Panasonic E640)]]= |
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| − | == |
+ | ==SiO<sub>2</sub> Etching (Panasonic 2)== |
| − | *[[media:Panasonic2-SiOx-Recipe.pdf| |
+ | *[[media:Panasonic2-SiOx-Recipe.pdf|SiO<sub>2</sub> Vertical Etch Recipe]] |
=[[ICP-Etch (Unaxis VLR)]]= |
=[[ICP-Etch (Unaxis VLR)]]= |
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Revision as of 11:49, 30 August 2013
Back to Dry Etching Recipes.