Difference between revisions of "ICP Etching Recipes"
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*[[media:Panasonic1-SiO-Etch.pdf|SiO<sub>2</sub> Vertical Etch Recipe]] |
*[[media:Panasonic1-SiO-Etch.pdf|SiO<sub>2</sub> Vertical Etch Recipe]] |
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==Cr Etch (Panasonic 1)== |
==Cr Etch (Panasonic 1)== |
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| − | *[[media:Panasonic-1-Cr-Etch.pdf|Cr Etch Recipes]] |
+ | *[[media:Panasonic-1-Cr-Etch-revA.pdf|Cr Etch Recipes]] |
=[[ICP Etch 2 (Panasonic E640)]]= |
=[[ICP Etch 2 (Panasonic E640)]]= |
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Revision as of 16:10, 10 July 2013
Back to Dry Etching Recipes.