Difference between revisions of "ICP Etching Recipes"
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{{recipes|Dry Etching}} |
{{recipes|Dry Etching}} |
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=[[ICP Etch 1 (Panasonic E626I)]]= |
=[[ICP Etch 1 (Panasonic E626I)]]= |
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| − | ==SiO Vertical Etch== |
+ | ==SiO<sub>2</sub> Vertical Etch== |
| − | *[[media:Panasonic1-SiO-Etch.pdf|SiO Vertical Etch Recipe]] |
+ | *[[media:Panasonic1-SiO-Etch.pdf|SiO<sub>2</sub> Vertical Etch Recipe]] |
=[[ICP Etch 2 (Panasonic E640)]]= |
=[[ICP Etch 2 (Panasonic E640)]]= |
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Revision as of 13:15, 20 August 2012
Back to Dry Etching Recipes.