Difference between revisions of "ICP Etching Recipes"

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{{recipes|Dry Etching}}
 
{{recipes|Dry Etching}}
 
=[[ICP Etch 1 (Panasonic E626I)]]=
 
=[[ICP Etch 1 (Panasonic E626I)]]=
 +
==SiO Vertical Etch==
 +
*[[media:Panasonic1-SiO-Etch.pdf|SiO Vertical Etch]]
 
=[[ICP Etch 2 (Panasonic E640)]]=
 
=[[ICP Etch 2 (Panasonic E640)]]=
 
=[[ICP-Etch (Unaxis VLR)]]=
 
=[[ICP-Etch (Unaxis VLR)]]=

Revision as of 07:56, 20 August 2012