Difference between revisions of "ICP Etching Recipes"

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===GaAs Etch ===
 
===GaAs Etch ===
 
*[[media:15-GaAs_etch-Unaxis_ICP_etcher.pdf|GaAs Etch Recipe (30C)]]
 
*[[media:15-GaAs_etch-Unaxis_ICP_etcher.pdf|GaAs Etch Recipe (30C)]]
 +
===AlGaAs Etch ===
 +
*[[media:|AlGaAs Etch Recipe (30C)]]
 
==InP Etch (Unaxis VLR)==
 
==InP Etch (Unaxis VLR)==
 
===InP Etch ===
 
===InP Etch ===

Revision as of 12:47, 2 October 2013