Difference between revisions of "ICP Etching Recipes"

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==AlGaAs Etch (Panasonic 1)==
 
==AlGaAs Etch (Panasonic 1)==
*[[media:|AlGaAs Etch Recipes]]
+
*[[media:12-Plasma_Etching_of_AlGaAs-Panasonic_ICP-1-Etcher.pdf|AlGaAs Etch Recipes]]
  
 
==GaN Etch (Panasonic 1)==
 
==GaN Etch (Panasonic 1)==

Revision as of 09:59, 2 October 2013