Difference between revisions of "ICP Etching Recipes"

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==Ti Etch (Panasonic 1)==
 
==Ti Etch (Panasonic 1)==
 
*[[media:Panasonic-1-Ti-Etch-Deep-RevA.pdf|Ti Deep Etch Recipes]]
 
*[[media:Panasonic-1-Ti-Etch-Deep-RevA.pdf|Ti Deep Etch Recipes]]
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 +
==AlGaAs Etch (Panasonic 1)==
 +
*[[media:|AlGaAs Etch Recipes]]
  
 
==GaN Etch (Panasonic 1)==
 
==GaN Etch (Panasonic 1)==

Revision as of 09:57, 2 October 2013