Difference between revisions of "ICP Etching Recipes"

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==Cr Etch (Panasonic 1)==
 
==Cr Etch (Panasonic 1)==
 
*[[media:Panasonic-1-Cr-Etch-revA.pdf|Cr Etch Recipes]]
 
*[[media:Panasonic-1-Cr-Etch-revA.pdf|Cr Etch Recipes]]
 +
 +
==Ti Etch (Panasonic 1)==
 +
*[[media:Panasonic-1-Ti-Etch-Deep-RevA.pdf|Ti Deep Etch Recipes]]
  
 
==GaN Etch (Panasonic 1)==
 
==GaN Etch (Panasonic 1)==

Revision as of 14:52, 27 September 2013