Difference between revisions of "ICP Etching Recipes"
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*[[media:Panasonic1-SiO-Etch.pdf|SiO<sub>2</sub> Vertical Etch Recipe Parameters]] |
*[[media:Panasonic1-SiO-Etch.pdf|SiO<sub>2</sub> Vertical Etch Recipe Parameters]] |
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*[[media:Panasonic1-SiO2-Data-Process-Variation-CHF3-revA.pdf|SiO<sub>2</sub> CHF3 Etch Variations]] |
*[[media:Panasonic1-SiO2-Data-Process-Variation-CHF3-revA.pdf|SiO<sub>2</sub> CHF3 Etch Variations]] |
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| + | ==Al Etch (Panasonic 1)== |
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| + | *[[media:Panasonic-1-Cr-Etch-revA.pdf|Al Etch Recipes]] |
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==Cr Etch (Panasonic 1)== |
==Cr Etch (Panasonic 1)== |
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Revision as of 11:49, 27 September 2013
Back to Dry Etching Recipes.