Difference between revisions of "ICP Etching Recipes"

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*[[media:Panasonic1-SiO-Etch.pdf|SiO<sub>2</sub> Vertical Etch Recipe Parameters]]
 
*[[media:Panasonic1-SiO-Etch.pdf|SiO<sub>2</sub> Vertical Etch Recipe Parameters]]
 
*[[media:Panasonic1-SiO2-Data-Process-Variation-CHF3-revA.pdf|SiO<sub>2</sub> CHF3 Etch Variations]]
 
*[[media:Panasonic1-SiO2-Data-Process-Variation-CHF3-revA.pdf|SiO<sub>2</sub> CHF3 Etch Variations]]
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==Al Etch (Panasonic 1)==
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*[[media:Panasonic-1-Cr-Etch-revA.pdf|Al Etch Recipes]]
  
 
==Cr Etch (Panasonic 1)==
 
==Cr Etch (Panasonic 1)==

Revision as of 10:49, 27 September 2013