Difference between revisions of "ICP Etching Recipes"
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{{recipes|Dry Etching}} |
{{recipes|Dry Etching}} |
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=[[Si Deep RIE (PlasmaTherm/Bosch Etch)]]= |
=[[Si Deep RIE (PlasmaTherm/Bosch Etch)]]= |
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| − | ==Single-step Si Etching (not Bosch!) (Si Deep RIE)== |
+ | ==Single-step Si Etching (not Bosch Process!) (Si Deep RIE)== |
*[[media:10-Si_Etch_using_DRIE_(single-step).pdf|Single-step Si Vertical Etch Recipe]] |
*[[media:10-Si_Etch_using_DRIE_(single-step).pdf|Single-step Si Vertical Etch Recipe]] |
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Revision as of 11:09, 25 September 2013
Back to Dry Etching Recipes.