Difference between revisions of "ICP Etching Recipes"

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{{recipes|Dry Etching}}
 
{{recipes|Dry Etching}}
 
=[[Si Deep RIE (PlasmaTherm/Bosch Etch)]]=
 
=[[Si Deep RIE (PlasmaTherm/Bosch Etch)]]=
==Single-step Si Etching (not Bosch!) (Si Deep RIE)==
+
==Single-step Si Etching (not Bosch Process!) (Si Deep RIE)==
 
*[[media:10-Si_Etch_using_DRIE_(single-step).pdf|Single-step Si Vertical Etch Recipe]]
 
*[[media:10-Si_Etch_using_DRIE_(single-step).pdf|Single-step Si Vertical Etch Recipe]]
  

Revision as of 10:09, 25 September 2013