Difference between revisions of "ICP Etching Recipes"

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{{recipes|Dry Etching}}
 
{{recipes|Dry Etching}}
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=[[Si Deep RIE (PlasmaTherm/Bosch Etch)]]=
 +
==Single-step Si Etching (not Bosch!) (Si Deep RIE)==
 +
*[[media:|Single-step Si Vertical Etch Recipe]]
 +
 
=[[ICP Etch 1 (Panasonic E626I)]]=
 
=[[ICP Etch 1 (Panasonic E626I)]]=
 
==SiO<sub>2</sub> Etching (Panasonic 1)==
 
==SiO<sub>2</sub> Etching (Panasonic 1)==

Revision as of 08:57, 25 September 2013