Difference between revisions of "ICP Etching Recipes"

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=[[RIE Etch 5 (RIE#5)]]=
 
=[[RIE Etch 5 (RIE#5)]]=
 
==GaN Etching (RIE#5)==
 
==GaN Etching (RIE#5)==
*[[media:|GaN Etch Recipe]]
+
*[[media:08-Plasma_Etching_of_GaN-RIE5.pdf|GaN Etch Recipe]]
  
 
=[[ICP Etch 1 (Panasonic E626I)]]=
 
=[[ICP Etch 1 (Panasonic E626I)]]=

Revision as of 14:41, 19 September 2013