Difference between revisions of "ICP Etching Recipes"
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{{recipes|Dry Etching}} |
{{recipes|Dry Etching}} |
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+ | =[[RIE Etch 5 (RIE#5)]]= |
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+ | ==GaN Etching (RIE#5)== |
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+ | *[[media:|GaN Etch Recipe]] |
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+ | |||
=[[ICP Etch 1 (Panasonic E626I)]]= |
=[[ICP Etch 1 (Panasonic E626I)]]= |
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==SiO<sub>2</sub> Etching (Panasonic 1)== |
==SiO<sub>2</sub> Etching (Panasonic 1)== |
Revision as of 15:38, 19 September 2013
Back to Dry Etching Recipes.
RIE Etch 5 (RIE#5)
GaN Etching (RIE#5)
- [[media:|GaN Etch Recipe]]