Difference between revisions of "ICP Etching Recipes"

From UCSB Nanofab Wiki
Jump to navigation Jump to search
Line 1: Line 1:
 
{{recipes|Dry Etching}}
 
{{recipes|Dry Etching}}
 +
=[[RIE Etch 5 (RIE#5)]]=
 +
==GaN Etching (RIE#5)==
 +
*[[media:|GaN Etch Recipe]]
 +
 
=[[ICP Etch 1 (Panasonic E626I)]]=
 
=[[ICP Etch 1 (Panasonic E626I)]]=
 
==SiO<sub>2</sub> Etching (Panasonic 1)==
 
==SiO<sub>2</sub> Etching (Panasonic 1)==

Revision as of 14:38, 19 September 2013