Difference between revisions of "ICP Etching Recipes"

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===InP Etch (H<sub>2</sub> Ar)===
 
===InP Etch (H<sub>2</sub> Ar)===
 
*[[media:UNAXIS-VLR-InP-Etch-Ar-200C-Recipe.pdf|InP Etch Recipe (H<sub>2</sub> Ar 200C)]]
 
*[[media:UNAXIS-VLR-InP-Etch-Ar-200C-Recipe.pdf|InP Etch Recipe (H<sub>2</sub> Ar 200C)]]
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=[[Si-Etch (XeF2 Etch (Xetch))]]=
 
=[[Si-Etch (XeF2 Etch (Xetch))]]=
 
*[[media:06-XeF2-etch-recipe.pdf|Si Etch Recipe]]
 
*[[media:06-XeF2-etch-recipe.pdf|Si Etch Recipe]]

Revision as of 14:49, 18 September 2013