Difference between revisions of "ICP Etching Recipes"
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==GaN Etch (Panasonic 1)== |
==GaN Etch (Panasonic 1)== |
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− | *[[media:| |
+ | *[[media:|GaN Etch Recipes]] |
=[[ICP Etch 2 (Panasonic E640)]]= |
=[[ICP Etch 2 (Panasonic E640)]]= |
Revision as of 15:44, 18 September 2013
Back to Dry Etching Recipes.
ICP Etch 1 (Panasonic E626I)
SiO2 Etching (Panasonic 1)
Cr Etch (Panasonic 1)
GaN Etch (Panasonic 1)
- [[media:|GaN Etch Recipes]]