Difference between revisions of "ICP Etching Recipes"

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==Cr Etch (Panasonic 1)==
 
==Cr Etch (Panasonic 1)==
 
*[[media:Panasonic-1-Cr-Etch-revA.pdf|Cr Etch Recipes]]
 
*[[media:Panasonic-1-Cr-Etch-revA.pdf|Cr Etch Recipes]]
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 +
==GaN Etch (Panasonic 1)==
 +
*[[media:|Cr Etch Recipes]]
  
 
=[[ICP Etch 2 (Panasonic E640)]]=
 
=[[ICP Etch 2 (Panasonic E640)]]=

Revision as of 14:19, 18 September 2013