Difference between revisions of "ICP Etching Recipes"

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=[[ICP Etch 2 (Panasonic E640)]]=
 
=[[ICP Etch 2 (Panasonic E640)]]=
==SiOx Vertical Etch (Panasonic 2)==
+
==SiO<sub>2</sub> Etching (Panasonic 2)==
*[[media:Panasonic2-SiOx-Recipe.pdf|SiOx Vertical Etch Recipe]]
+
*[[media:Panasonic2-SiOx-Recipe.pdf|SiO<sub>2</sub> Vertical Etch Recipe]]
  
 
=[[ICP-Etch (Unaxis VLR)]]=
 
=[[ICP-Etch (Unaxis VLR)]]=

Revision as of 10:49, 30 August 2013