Difference between revisions of "ICP Etching Recipes"

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==SiO<sub>2</sub> Vertical Etch (Panasonic 1)==
 
==SiO<sub>2</sub> Vertical Etch (Panasonic 1)==
 
*[[media:Panasonic1-SiO-Etch.pdf|SiO<sub>2</sub> Vertical Etch Recipe]]
 
*[[media:Panasonic1-SiO-Etch.pdf|SiO<sub>2</sub> Vertical Etch Recipe]]
 +
*[[media:Panasonic1-SiO2-Data-Process-Variation-CHF3-revA.pdf|SiO<sub>2</sub> CHF3 Etch Variations]]
 +
 
==SiO<sub>2</sub> Pure CHF3 Etch Recipe Variations (Panasonic 1)==
 
==SiO<sub>2</sub> Pure CHF3 Etch Recipe Variations (Panasonic 1)==
 
*[[media:==SiO<sub>2</sub> Vertical Etch (Panasonic 1)|SiO<sub>2</sub> Vertical Etch Recipe]]
 
*[[media:==SiO<sub>2</sub> Vertical Etch (Panasonic 1)|SiO<sub>2</sub> Vertical Etch Recipe]]

Revision as of 10:20, 30 August 2013