Difference between revisions of "ICP Etching Recipes"

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==SiO<sub>2</sub> Vertical Etch (Panasonic 1)==
 
==SiO<sub>2</sub> Vertical Etch (Panasonic 1)==
 
*[[media:Panasonic1-SiO-Etch.pdf|SiO<sub>2</sub> Vertical Etch Recipe]]
 
*[[media:Panasonic1-SiO-Etch.pdf|SiO<sub>2</sub> Vertical Etch Recipe]]
 +
*[[media:Panasonic1-SiO-Etch-SEM.pdf|SiO<sub>2</sub> SEM image Vertical Etch ]]
 +
 
==Cr Etch (Panasonic 1)==
 
==Cr Etch (Panasonic 1)==
 
*[[media:Panasonic-1-Cr-Etch-revA.pdf|Cr Etch Recipes]]
 
*[[media:Panasonic-1-Cr-Etch-revA.pdf|Cr Etch Recipes]]

Revision as of 09:42, 21 August 2013