Difference between revisions of "ICP Etching Recipes"

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*[[media:Panasonic1-SiO-Etch.pdf|SiO<sub>2</sub> Vertical Etch Recipe]]
 
*[[media:Panasonic1-SiO-Etch.pdf|SiO<sub>2</sub> Vertical Etch Recipe]]
 
==Cr Etch (Panasonic 1)==
 
==Cr Etch (Panasonic 1)==
*[[media:Panasonic-1-Cr-Etch|Cr Etch Recipes]]
+
*[[media:Panasonic-1-Cr-Etch.pdf|Cr Etch Recipes]]
  
 
=[[ICP Etch 2 (Panasonic E640)]]=
 
=[[ICP Etch 2 (Panasonic E640)]]=

Revision as of 14:34, 10 July 2013